Abstract: The present invention provides a parking space sensor, which comprises a sensing module, a control unit, and a trigger module. The sensing module senses the status of a parking space and generates a sensing signal. When the parking space sensor, and hence the trigger module, is flipped over, the trigger module triggers the control unit to perform an initialization procedure, in which the control unit transmits an initialization signal to the sensing module for initializing the sensing module. Thereby, the status of the parking space can be sensed and a sensing signal can be generated. Then the control unit produces a piece of parking space information according to the sensing signal.

Abstract: The present invention provides a parking space sensor, which comprises a sensing module, a control unit, and a trigger module. The sensing module senses the status of a parking space and generates a sensing signal. When the parking space sensor, and hence the trigger module, is flipped over, the trigger module triggers the control unit to perform an initialization procedure, in which the control unit transmits an initialization signal to the sensing module for initializing the sensing module. Thereby, the status of the parking space can be sensed and a sensing signal can be generated. Then the control unit produces a piece of parking space information according to the sensing signal.

Abstract: A method for forming a layer of silicon nitride that includes providing at least one silicon wafer in a first chamber with ammonia gas, wherein the first chamber is substantially enclosed, and the at least one silicon wafer reacts with the ammonia gas to form a first layer of silicon nitride on the at least one silicon wafer, providing a second chamber with the ammonia gas, moving the at least one silicon wafer into the second chamber, and forming a second layer of silicon nitride on the silicon wafer.