Abstract: A method for manufacturing a condenser microphone includes forming a diaphragm module using microelectromechanical system (MEMS) techniques. The diaphragm module includes a diaphragm that is deformable by energy of sound waves, and a diaphragm spacer that extends from one side of the diaphragm and controls a tension of the diaphragm. The method further includes providing a backplate with vent holes, aligning the vent holes of the backplate with a central region of the diaphragm, and connecting the backplate to the diaphragm spacer to construct a transducer unit. The diaphragm spacer, the diaphragm and the backplate cooperate to form an air chamber in fluid communication with an environment external to the condenser microphone. The backplate and the diaphragm cooperate to form a condenser. The method further includes enclosing the transducer unit in a housing that includes a shell and a circuit board to form the condenser microphone.

Abstract: A method for manufacturing a condenser microphone includes forming a diaphragm module using microelectromechanical system (MEMS) techniques. The diaphragm module includes a diaphragm that is deformable by energy of sound waves, and a diaphragm spacer that extends from one side of the diaphragm and controls a tension of the diaphragm. The method further includes providing a backplate with vent holes, aligning the vent holes of the backplate with a central region of the diaphragm, and connecting the backplate to the diaphragm spacer to construct a transducer unit. The diaphragm spacer, the diaphragm and the backplate cooperate to form an air chamber in fluid communication with an environment external to the condenser microphone. The backplate and the diaphragm cooperate to form a condenser. The method further includes enclosing the transducer unit in a housing that includes a shell and a circuit board to form the condenser microphone.

Abstract: A method of eliminating leakage current in shallow trench isolation is disclosed. After the trench is formed on the substrate, the liner oxide layer is formed in the furnace by introducing transdichloroethylene (TLC) into the furnace to round the corner of the trench. An electric filed near the rounded trench corner is decreased; thus, the leakage current produced in the corner of the shallow trench isolation is eliminated.

Abstract: A gate for preventing dopants from penetrating a gate insulator comprises a polysilicon layer and an amorphous-silicon layer disposing on the polysilicon layer. The layered gate inhibits dopants from penetrating through a gate oxide layer disposing between the gate and a substrate. A source and a drain are disposed in the substrate beside the amorphous-silicon layer and the polysilicon layer.