Abstract: A semiconductor device includes a FEOL structure and a BEOL structure. The BEOL structure is formed over the FEOL structure and includes a conductive layer, an etching stop layer (ESL) structure, a through via and a barrier layer. The ESL structure is formed over the conductive layer and has a first recess and a lateral surface. The through via passes through the ESL structure to form the first recess and the lateral surface. The barrier layer covers the lateral surface and the first recess. The first recess is recessed with respect to the lateral surface, and the first recess has a first depth ranging between 1 nm and 7 nm.

Abstract: A semiconductor manufacturing apparatus for performing a process is disclosed. An apparatus includes a chamber configured to receive a wafer for an etching process; a conductive focus ring disposed within the chamber and configured to focus an electric field to control an etch direction of the etching process; and an insulative cover ring disposed within the chamber, wherein the insulative cover ring is configured to modify the electric field, wherein the insulative cover ring has an inner annular insulative portion and outer annular insulative portion, and wherein a gap is defined between the inner annular insulative portion and the outer annular insulative portion.

Abstract: A method includes forming a first etch stop layer (ESL) over a conductive feature, forming a first dielectric layer on the first ESL, forming a second ESL on the first dielectric layer, forming a second dielectric layer on the second ESL, forming a trench in the second dielectric layer, forming a first opening in a bottom surface of the trench extending through the second dielectric layer, and forming a second opening in a bottom surface of the first opening. The second opening extends through the first dielectric layer and the first ESL. The second opening exposes a top surface of the conductive feature. The method further includes widening the first opening to a second width, filling the trench with a conductive material to form a conductive line, and filling the second opening and the first opening with the conductive material to form a conductive via.

Abstract: A method includes forming a first etch stop layer (ESL) over a conductive feature, forming a first dielectric layer on the first ESL, forming a second ESL on the first dielectric layer, forming a second dielectric layer on the second ESL, forming a trench in the second dielectric layer, forming a first opening in a bottom surface of the trench extending through the second dielectric layer, and forming a second opening in a bottom surface of the first opening. The second opening extends through the first dielectric layer and the first ESL. The second opening exposes a top surface of the conductive feature. The method further includes widening the first opening to a second width, filling the trench with a conductive material to form a conductive line, and filling the second opening and the first opening with the conductive material to form a conductive via.

Abstract: A method includes forming a first etch stop layer (ESL) over a conductive feature, forming a first dielectric layer on the first ESL, forming a second ESL on the first dielectric layer, forming a second dielectric layer on the second ESL, forming a trench in the second dielectric layer, forming a first opening in a bottom surface of the trench extending through the second dielectric layer, and forming a second opening in a bottom surface of the first opening. The second opening extends through the first dielectric layer and the first ESL. The second opening exposes a top surface of the conductive feature. The method further includes widening the first opening to a second width, filling the trench with a conductive material to form a conductive line, and filling the second opening and the first opening with the conductive material to form a conductive via.

Abstract: A method includes forming a first etch stop layer (ESL) over a conductive feature, forming a first dielectric layer on the first ESL, forming a second ESL on the first dielectric layer, forming a second dielectric layer on the second ESL, forming a trench in the second dielectric layer, forming a first opening in a bottom surface of the trench extending through the second dielectric layer, and forming a second opening in a bottom surface of the first opening. The second opening extends through the first dielectric layer and the first ESL. The second opening exposes a top surface of the conductive feature. The method further includes widening the first opening to a second width, filling the trench with a conductive material to form a conductive line, and filling the second opening and the first opening with the conductive material to form a conductive via.

Abstract: A ball-lock axial connector assembly includes a receiving member, and a sleeve having one end is received in the receiving member. The sleeve has three apertures defined radially through the wall thereof so as to receive a bead in each of the apertures. A portion of the bead is located within the sleeve. A guide face extends from each of the apertures and toward the receiving member. A positioning member and a push member are mounted to the sleeve. A first resilient member is biased between the positioning member and the push member. The push member has three protrusions which extend through the positioning member and contact the beads respectively. A case is movably mounted to the positioning member and the push member. A second resilient member is located between the bead and the receiving member. The beads are pushed to be removed from the apertures by pushing the case.

Abstract: A clamp device for axial connector includes a clamp unit which has two clamp members connected to the first end thereof, and the two clamp members are located corresponding to each other. Each clamp member has a clamp portion and each clamp portion has a slot. The clamp unit has two arms pivotably connected to each other in a cross form. The clamp members clamp the axial connector and the protrusions on the axial connector are engaged with the slots of the clamp members.

Abstract: A locking tool includes a holding portion which is a semi-circular and cylindrical plate. Two first extensions and a second extension extend from the first distal end of the holding portion. The first extensions each are a straight extension and extend radially and outward. The second extension has a curvature the same as that of the holding portion. Two notches are defined in the first distal end of the holding portion. The holding portion holds the body of the co-axial connector and the blocks on the co-axial connector are engaged with the notches to efficiently lock or unlock the co-axial connector.

Abstract: A coaxial connector includes a lip portion on one end thereof and an extension section coaxially extends from the lip portion. The extension section has a tubular portion coaxially mounted thereto and at least one protrusion extends from the outer surface of the tubular portion. A tool for disconnecting and connecting the coaxial connector includes a mounting portion for being mounted to the coaxial connector and the mounting portion has a yield slot defined therein which is located corresponding to the at least one protrusion of the coaxial connector.

Abstract: A coaxial connector includes an inner tube, an outer tube, a center connector unit and a resilient member. The inner and outer tube each have a first/second body, and each of the first and second bodies has a semi-circular first/second tubular portion. A first flange extends outward from the front end of the first tubular portion. The outer tube has a first stepped portion formed in the inside of the front end of the second tubular portion thereof. The center connector unit is securely located in the first and second bodies. The resilient member has a curved body with two legs bent from two ends thereof. The curved body of the resilient member is engaged between the first flange and the first stepped portion. The legs extend beyond the first and second tubular portions. The coaxial connector is easily assembled and has lower manufacturing cost.

Abstract: A clamp device for axial connector includes a clamp unit which has two clamp members connected to the first end thereof, and the two clamp members are located corresponding to each other. Each clamp member has a clamp portion and each clamp portion has a slot. The clamp unit has two arms pivotably connected to each other in a cross form. The clamp members clamp the axial connector and the protrusions on the axial connector are engaged with the slots of the clamp members.

Abstract: A coaxial connector includes an inner tube, an outer tube, a center connector unit and a resilient member. The inner and outer tube each have a first/second body, and each of the first and second bodies has a semi-circular first/second tubular portion. A first flange extends outward from the front end of the first tubular portion. The outer tube has a first stepped portion formed in the inside of the front end of the second tubular portion thereof. The center connector unit is securely located in the first and second bodies. The resilient member has a curved body with two legs bent from two ends thereof. The curved body of the resilient member is engaged between the first flange and the first stepped portion. The legs extend beyond the first and second tubular portions. The coaxial connector is easily assembled and has lower manufacturing cost.

Abstract: A coaxial connector includes a lip portion on one end thereof and an extension section coaxially extends from the lip portion. The extension section has a tubular portion coaxially mounted thereto and at least one protrusion extends from the outer surface of the tubular portion. A tool for disconnecting and connecting the coaxial connector includes a mounting portion for being mounted to the coaxial connector and the mounting portion has a yield slot defined therein which is located corresponding to the at least one protrusion of the coaxial connector.

Abstract: A coaxial connector includes a lip portion on one end thereof and an extension section coaxially extends from the lip portion. The extension section has a tubular portion coaxially mounted thereto and at least one protrusion extends from the outer surface of the tubular portion. A tool for disconnecting and connecting the coaxial connector includes a mounting portion for being mounted to the coaxial connector and the mounting portion has a yield slot defined therein which is located corresponding to the at least one protrusion of the coaxial connector.

Abstract: A coaxial connector includes a lip portion on one end thereof and an extension section coaxially extends from the lip portion. The extension section has a tubular portion coaxially mounted thereto and at least one protrusion extends from the outer surface of the tubular portion. A tool for disconnecting and connecting the coaxial connector includes a mounting portion for being mounted to the coaxial connector and the mounting portion has a yield slot defined therein which is located corresponding to the at least one protrusion of the coaxial connector.

Abstract: The present invention is to present an electrical connector of a connector assembly having a detachable flexible C-shaped clip and a visor-like ferruled docking cantilever with a lower semicircular cutout and an arched groove configured in front end thereof, wherein said flexible C-shaped clip, which is to be lodged in the arched groove, has a pair of jutted noses for being latched and gripped by a corresponding pair of dents at the docking cantilever and a pair of bent latching toes for running through a pair of corresponding bores on the PCB in securely stable manner.

Abstract: The present invention is to present an electrical connector of a connector assembly having a detachable flexible C-shaped clip and a visor-like ferruled docking cantilever with a lower semicircular cutout and an arched groove configured in front end thereof, wherein said flexible C-shaped clip, which is to be lodged in the arched groove, has a pair of jutted noses for being latched and gripped by a corresponding pair of dents at the docking cantilever and a pair of bent latching toes for running through a pair of corresponding bores on the PCB in securely stable manner.

Abstract: An antenna assembly includes a reception member and an antenna terminal and the antenna terminal includes a metal core member which is inserted into the reception member. The reception member has an annular flange extending from an inner periphery thereof and a plurality of claws extend from a surface of the annular flange. An annular gap is defined between the claws and the inner periphery of the reception member. A plurality of ribs extend from the inner periphery of the reception member and located in the annular gap. The metal core member has an outer flange extending from an outer periphery thereof and the claws claw the outer periphery of the metal core member. The outer flange is in contact with the ribs.

Abstract: An antenna assembly includes a reception member and an antenna terminal and the antenna terminal includes a metal core member which is inserted into the reception member. The reception member has an annular flange extending from an inner periphery thereof and a plurality of claws extend from a surface of the annular flange. An annular gap is defined between the claws and the inner periphery of the reception member. A plurality of ribs extend from the inner periphery of the reception member and located in the annular gap. The metal core member has an outer flange extending from an outer periphery thereof and the claws claw the outer periphery of the metal core member. The outer flange is in contact with the ribs.