Patents by Inventor Chung-Hsin Lin
Chung-Hsin Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240121940Abstract: A semiconductor device and a method of manufacturing the semiconductor device are provided. The semiconductor device includes a substrate, a word line, a first capacitor, a second capacitor, a first bit line and a second bit line. The word line is disposed on the substrate and extends along a first direction. The first capacitor extends along a second direction different from the first direction and is located at a first level. The second capacitor extends along the second direction and is located at a second level different from the first level. The first bit line is electrically connected to the first capacitor and the word line. The second bit line is electrically connected to the second capacitor and the word line.Type: ApplicationFiled: July 13, 2023Publication date: April 11, 2024Inventors: SHIH-FAN KUAN, HSU-CHENG FAN, JIANN-JONG WANG, CHUNG-HSIN LIN, YU-TING LIN
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Publication number: 20240121939Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate, a word line, a first capacitor, a second capacitor, a first bit line and a second bit line. The word line is disposed on the substrate and extends along a first direction. The first capacitor extends along a second direction different from the first direction and is located at a first level. The second capacitor extends along the second direction and is located at a second level different from the first level. The first bit line is electrically connected to the first capacitor and the word line. The second bit line is electrically connected to the second capacitor and the word line.Type: ApplicationFiled: October 11, 2022Publication date: April 11, 2024Inventors: SHIH-FAN KUAN, HSU-CHENG FAN, JIANN-JONG WANG, CHUNG-HSIN LIN, YU-TING LIN
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Patent number: 9659886Abstract: The invention provides a semiconductor device including a substrate, a dielectric layer, a dummy bonding pad, a bonding pad, a redistribution layer, and a metal interconnect. The substrate includes a non-device region and a device region. The dielectric layer is on the non-device region and the device region. The dummy bonding pad is on the dielectric layer of the non-device region. The metal interconnect is in the dielectric layer of the non-device region and connected to the dummy bonding pad. The bonding pad is on the dielectric layer of the device region. The buffer layer is between the bonding pad and the dielectric layer. The buffer layer includes metal, metal nitride, or a combination thereof. The redistribution layer is on the dielectric layer and connects the dummy bonding pad and the bonding pad.Type: GrantFiled: June 27, 2016Date of Patent: May 23, 2017Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Chung-Hsin Lin, Ping-Heng Wu, Chao-Wen Lay, Hung-Mo Wu, Ying-Cheng Chuang
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Publication number: 20160307859Abstract: The invention provides a semiconductor device including a substrate, a dielectric layer, a dummy bonding pad, a bonding pad, a redistribution layer, and a metal interconnect. The substrate includes a non-device region and a device region. The dielectric layer is on the non-device region and the device region. The dummy bonding pad is on the dielectric layer of the non-device region. The metal interconnect is in the dielectric layer of the non-device region and connected to the dummy bonding pad. The bonding pad is on the dielectric layer of the device region. The buffer layer is between the bonding pad and the dielectric layer. The buffer layer includes metal, metal nitride, or a combination thereof. The redistribution layer is on the dielectric layer and connects the dummy bonding pad and the bonding pad.Type: ApplicationFiled: June 27, 2016Publication date: October 20, 2016Inventors: Chung-Hsin Lin, Ping-Heng Wu, Chao-Wen Lay, Hung-Mo Wu, Ying-Cheng Chuang
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Patent number: 9418949Abstract: The invention provides a semiconductor device including a substrate, a dielectric layer, a dummy bonding pad, a bonding pad, a redistribution layer, and a metal interconnect. The substrate includes a non-device region and a device region. The dielectric layer is on the non-device region and the device region. The dummy bonding pad is on the dielectric layer of the non-device region. The metal interconnect is in the dielectric layer of the non-device region and connected to the dummy bonding pad. The bonding pad is on the dielectric layer of the device region. The buffer layer is between the bonding pad and the dielectric layer. The buffer layer includes metal, metal nitride, or a combination thereof. The redistribution layer is on the dielectric layer and connects the dummy bonding pad and the bonding pad.Type: GrantFiled: September 17, 2013Date of Patent: August 16, 2016Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Chung-Hsin Lin, Ping-Heng Wu, Chao-Wen Lay, Hung-Mo Wu, Ying-Cheng Chuang
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Publication number: 20150076698Abstract: The invention provides a semiconductor device including a substrate, a dielectric layer, a dummy bonding pad, a bonding pad, a redistribution layer, and a metal interconnect. The substrate includes a non-device region and a device region. The dielectric layer is on the non-device region and the device region. The dummy bonding pad is on the dielectric layer of the non-device region. The metal interconnect is in the dielectric layer of the non-device region and connected to the dummy bonding pad. The bonding pad is on the dielectric layer of the device region. The buffer layer is between the bonding pad and the dielectric layer. The buffer layer includes metal, metal nitride, or a combination thereof The redistribution layer is on the dielectric layer and connects the dummy bonding pad and the bonding pad.Type: ApplicationFiled: September 17, 2013Publication date: March 19, 2015Applicant: NANYA TECHNOLOGY CORPORATIONInventors: Chung-Hsin Lin, Ping-Heng Wu, Chao-Wen Lay, Hung-Mo Wu, Ying-Cheng Chuang
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Publication number: 20130092955Abstract: A light-emitting diode (LED) and fabricating method thereof. The method includes: providing a first substrate and forming an epitaxial portion on the first substrate; forming at least one reflection layer on the epitaxial portion; forming a metal barrier portion on the reflection layer; etching the epitaxial portion and the barrier portion by a first etching process, so as to form a plurality of epitaxial layers and a plurality of metal barrier layers, an etch channel is formed between adjacent epitaxial layers, and each metal barrier layer enwraps a corresponding reflection layer and covers all of a surface of a corresponding epitaxial layer; forming a first bonding layer on the metal barrier layer; and forming a second substrate on the first bonding layer and removing the first substrate.Type: ApplicationFiled: February 23, 2012Publication date: April 18, 2013Applicant: CHI MEI LIGHTING TECHNOLOGY CORP.Inventors: Shin-Jia Chiou, Chung Hsin Lin, Chi-Lung Wu, Jui-Chun Chang
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Publication number: 20120305959Abstract: A light-emitting diode (LED) device, includes a substrate, having a first and a second surfaces, a first bonding layer, disposed on the first surface, a first epitaxial structure, having a third and a fourth surfaces and comprising a first and a second groove, wherein the first epitaxial structure comprises a second electrical type semiconductor layer, an active layer and a first electrical type semiconductor layer sequentially stacked on the first bonding layer, and the first groove extends from the fourth surface to the first electrical type semiconductor layer via the active layer, the second groove extends from the fourth surface to the third surface, a first electrical type conductive branch, a first electrical type electrode layer, an insulating layer, filled in the first and the second grooves, and a second electrical type electrode layer, electrically connected to the second electrical type semiconductor layer.Type: ApplicationFiled: September 23, 2011Publication date: December 6, 2012Applicant: CHI MEI LIGHTING TECHNOLOGY CORP.Inventors: Kuo-Hui Yu, Chang-Hsin Chu, Chi-Lung Wu, Shin-Jia Chiou, Chung-Hsin Lin, Jui-Chun Chang
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Patent number: 7413993Abstract: The invention is concerned with a process for removing residue comprising a polymeric resist and metal oxide from a metal structure on a semiconductor substrate, the process comprising the steps of: (a) heating up the substrate with the metal structure in the presence of molecular nitrogen gas (N2); (b) a stabilization step in the presence of pure molecular nitrogen gas (N2); (c) a passivation step employing a plasma containing at least one of the group of water, nitrogen and oxygen; and (d) a stripping step containing oxygen to remove the residue, comprising resist.Type: GrantFiled: November 22, 2004Date of Patent: August 19, 2008Assignees: Infineon Technologies AG, Nanya Technology CorporationInventors: Ronald Gottzein, Jens Bachmann, Dirk Efferenn, Uwe Kahler, Chung-Hsin Lin, Wen-Bin Lin, Lee Donohue
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Publication number: 20070243708Abstract: The present invention provides a manufacturing method for an integrated semiconductor contact structure having an improved Aluminum fill comprising the steps of: forming contact holes in an insulation layer provided on a wafer, said contact holes having a respective bottom and respective sidewalls, said bottoms including a respective conductive area; introducing said wafer into a first PVD deposition chamber, said first PVD deposition chamber including a wafer bias means; and cold depositing a first Aluminum layer on the wafer in said first PVD deposition chamber, said first Aluminum layer covering said bottoms and said sidewalls of said contact holes and forming a seed layer; wherein during said step of cold depositing said first Aluminum layer on the wafer in said first PVD deposition chamber said wafer bias means is set to a bias in the range between 20 W and 700 W or ?50 V to ?800 V.Type: ApplicationFiled: April 12, 2006Publication date: October 18, 2007Inventors: Jens Hahn, Tom Richter, Detlef Weber, Chung-Hsin Lin
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Patent number: 7157381Abstract: A method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits includes the following steps: providing a substrate; providing a whisker-containing layer made of aluminum metal or an aluminum alloy on the substrate; back-etching and/or resputtering the whisker-containing layer such that the whiskers are essentially removed; and structuring the whisker-free layer into the lines.Type: GrantFiled: June 15, 2004Date of Patent: January 2, 2007Assignees: Infineon Technologies AG, Nanya Technology CorporationInventors: Dirk Efferenn, Jens Hahn, Uwe Kahler, Chung-Hsin Lin, Jens Bachmann, Wen-Bin Lin, Grit Bonsdorf
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Publication number: 20060108324Abstract: The invention is concerned with a process for removing residue comprising a polymeric resist and metal oxide from a metal structure on a semiconductor substrate, the process comprising the steps of: (a) heating up the substrate with the metal structure in the presence of molecular nitrogen gas (N2); (b) a stabilization step in the presence of pure molecular nitrogen gas (N2); (c) a passivation step employing a plasma containing at least one of the group of water, nitrogen and oxygen; and (d) a stripping step containing oxygen to remove the residue, comprising resist.Type: ApplicationFiled: November 22, 2004Publication date: May 25, 2006Inventors: Ronald Gottzein, Jens Bachmann, Dirk Efferenn, Uwe Kahler, Chung-Hsin Lin, Wen-Bin Lin, Lee Donohue
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Publication number: 20050277300Abstract: A method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits includes the following steps: providing a substrate; providing a whisker-containing layer made of aluminum metal or an aluminum alloy on the substrate; back-etching and/or resputtering the whisker-containing layer such that the whiskers are essentially removed; and structuring the whisker-free layer into the lines.Type: ApplicationFiled: June 15, 2004Publication date: December 15, 2005Inventors: Dirk Efferenn, Jens Hahn, Uwe Kahler, Chung-Hsin Lin, Jens Bachmann, Wen-Bin Lin, Grit Bonsdorf