Abstract: The present disclosure provides a routing structure. The routing structure includes a substrate having a boundary and a first conductive trace configured to be coupled to a first conductive pad disposed within the boundary of the substrate. The first conductive trace is inclined with respect to the boundary of the substrate.

Abstract: A photolithography tool includes at least one process chamber, at least one front opening unified pod (FOUP) stage, at least one moving mechanism, and an image sensor. The moving mechanism is configured to move the wafer from the process chamber to the FOUP stage. The image sensor is configured to capture the image of the wafer on the moving mechanism.

Abstract: A photolithography tool includes at least one process chamber, at least one front opening unified pod (FOUP) stage, at least one moving mechanism, and an image sensor. The moving mechanism is configured to move the wafer from the process chamber to the FOUP stage. The image sensor is configured to capture the image of the wafer on the moving mechanism.

Abstract: A method and apparatus using steam to sterilize liquid dispensers. This is achieved by injecting steam into a drained dispenser machine equipped with a cover having a safety valve that matches the top of the dispenser to provide sealing. The steam is generated by a steam generator physically integrated with the new liquid dispenser machine. The steam circulates through the fluid compartment of the liquid dispenser and continues through its conduits and exits at the taps which are held open by a stepped boss. The sanitizing period can be adjusted and controlled. After sterilizing the machine, the cap of the dispenser is removed and its taps are released in order to return the machine back to its normal operation.