Patents by Inventor Chung JU
Chung JU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250253250Abstract: A circuit device having an interlayer dielectric with pillar-type air gaps and a method of forming the circuit device are disclosed. In an exemplary embodiment, the method comprises receiving a substrate and depositing a first layer over the substrate. A copolymer layer that includes a first constituent polymer and a second constituent polymer is formed over the first layer. The first constituent polymer is selectively removed from the copolymer layer. A first region of the first layer corresponding to the selectively removed first constituent polymer is etched. The etching leaves a second region of the first layer underlying the second constituent polymer unetched. A metallization process is performed on the etched substrate, and the first layer is removed from the second region to form an air gap. The method may further comprise depositing a dielectric material within the etched first region.Type: ApplicationFiled: March 21, 2025Publication date: August 7, 2025Inventors: Chih Wei LU, Tien-I BAO, Chung-Ju LEE
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Publication number: 20250246507Abstract: A semiconductor device includes a first interconnect structure, a device layer, a second interconnect structure, a diamond layer, a passivation layer, and an electrical connector. The device layer is disposed over the first interconnect structure. The second interconnect structure is disposed over the device layer and comprises a topmost metallization pattern. The diamond layer is disposed over the second interconnect structure and at least revealing a part of the topmost metallization pattern. The passivation layer covers the diamond layer and reveals the part of the topmost metallization pattern. The electrical connector is disposed over the passivation layer and bonded to the part of the topmost metallization pattern.Type: ApplicationFiled: January 29, 2024Publication date: July 31, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Han-Jong Chia, Yu-Jen Lien, Ke-Han Shen, Cheng-Chieh Hsieh, Kuo-Chung Yee, Szu-Wei Lu, Chung-Ju Lee, Chen-Hua Yu, Ji CUI, Chih-Ming Ke, Hung-Yi Kuo
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Patent number: 12368046Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method of forming a semiconductor device comprises receiving a structure including a substrate and a first hard mask over the substrate, the first hard mask having at least two separate portions; forming spacers along sidewalls of the at least two portions of the first hard mask with a space between the spacers; forming a second hard mask in the space; forming a first cut in the at least two portions of the first hard mask; forming a second cut in the second hard mask; and depositing a cut hard mask in the first cut and the second cut.Type: GrantFiled: December 18, 2023Date of Patent: July 22, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsi-Wen Tien, Wei-Hao Liao, Pin-Ren Dai, Chih Wei Lu, Chung-Ju Lee
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Patent number: 12354881Abstract: A semiconductor structure includes a conductive feature disposed over a semiconductor substrate, a via disposed in a first interlayer dielectric (ILD) layer over the conductive feature, and a metal-containing etch-stop layer (ESL) disposed on the via, where the metal-containing ESL includes a first metal and is resistant to etching by a fluorine-containing etchant. The semiconductor structure further includes a conductive line disposed over the metal-containing ESL, where the conductive line includes a second metal different from the first metal and is etchable by the fluorine-containing etchant, and where the via is configured to interconnect the conductive line to the conductive feature. Furthermore, the semiconductor structure includes a second ILD layer disposed over the first ILD layer.Type: GrantFiled: February 26, 2024Date of Patent: July 8, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Hao Liao, Hsi-Wen Tien, Chih Wei Lu, Pin-Ren Dai, Chung-Ju Lee
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Publication number: 20250210067Abstract: A storage device bracket configured to hold and position a storage device includes a bracket body and at least one positioning assembly. The storage device has first and second grooves respectively provided on two opposite sides thereof. The bracket body defines a receiving space for receiving the storage device. The at least one positioning assembly includes an engaging hook and an elastic engaging plate respectively provided on two opposite sides of the bracket body. The engaging hook protrudes from one of the opposite sides of the bracket body into the receiving space, and is configured to be removably inserted into the first groove. The elastic engaging plate has an elastic plate portion, and a protrusion connected to and protruding from the elastic plate portion into the receiving space for insertion into the second groove so as to limit movement of the storage device relative to the storage device bracket.Type: ApplicationFiled: December 16, 2024Publication date: June 26, 2025Applicant: Jabil Circuit (Singapore) Pte. Ltd.Inventors: Hsun-Wei Fan, Chen-Hsuan Hsu, Chung-Ju Wang, Kuo-Hsing Yang
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Publication number: 20250191971Abstract: The present disclosure relates to an integrated chip. The integrated chip comprises a dielectric layer over a substrate. A first metal feature is over the dielectric layer. A second metal feature is over the dielectric layer and is laterally adjacent to the first metal feature. A first dielectric liner segment extends laterally between the first metal feature and the second metal feature along an upper surface of the dielectric layer. The first dielectric liner segment extends continuously from along the upper surface of the dielectric layer, to along a sidewall of the first metal feature that faces the second metal feature, and to along a sidewall of the second metal feature that faces the first metal feature. A first cavity is laterally between sidewalls of the first dielectric liner segment and is above an upper surface of the first dielectric liner segment.Type: ApplicationFiled: February 19, 2025Publication date: June 12, 2025Inventors: Hsi-Wen Tien, Chung-Ju Lee, Chih Wei Lu, Hsin-Chieh Yao, Shau-Lin Shue, Yu-Teng Dai, Wei-Hao Liao
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Publication number: 20250191973Abstract: In one embodiment, a method of forming metal interconnects uses a direct metal etch approach to form and fill the metal gap. The method may include directly etching a metal layer to form metal patterns. The metal patterns may be spaced apart from one another by recesses. A dielectric spacer may be formed extending along the sidewalls of each of the recesses. The recesses may be filled with a conductive material to form a second set of metal patterns. By directly etching the metal film, the technique allows for reduced line width roughness. The disclosed structure may have the advantages of increased reliability, better RC performance and reduced parasitic capacitance.Type: ApplicationFiled: February 18, 2025Publication date: June 12, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsi-Wen Tien, Wei-Hao Liao, Yu-Teng Dai, Hsin-Chieh Yao, Chih-Wei Lu, Chung-Ju Lee
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Patent number: 12322723Abstract: The present disclosure relates to a semiconductor structure including an interconnect structure disposed over a semiconductor substrate. A lower metal line is disposed at a first height over the semiconductor substrate and extends through a first interlayer dielectric layer. A second interlayer dielectric layer is disposed at a second height over the semiconductor substrate and comprises a first dielectric material. An upper metal line is disposed at a third height over the semiconductor substrate. A via is disposed at the second height. The via extends between the lower metal line and the upper metal line. A protective dielectric structure is disposed at the second height. The protective dielectric structure comprises a protective dielectric material and is disposed along a first set of opposing sidewalls of the via, the protective dielectric material differing from the first dielectric material.Type: GrantFiled: July 26, 2023Date of Patent: June 3, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsin-Chieh Yao, Chung-Ju Lee, Chih Wei Lu, Hsi-Wen Tien, Yu-Teng Dai, Wei-Hao Liao
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Patent number: 12315817Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a first interconnect dielectric layer over a substrate. An interconnect wire extends through the first interconnect dielectric layer, and a dielectric on wire structure is arranged directly over the interconnect wire. Outer sidewalls of the dielectric on wire structure are surrounded by the first interconnect dielectric layer. The integrated chip further includes a second interconnect dielectric layer arranged over the first interconnect dielectric layer, and an interconnect via that extends through the second interconnect dielectric layer and the dielectric on wire structure to contact the interconnect wire.Type: GrantFiled: May 3, 2023Date of Patent: May 27, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsin-Chieh Yao, Chung-Ju Lee, Chih Wei Lu, Hsi-Wen Tien, Yu-Teng Dai, Wei-Hao Liao
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Patent number: 12300600Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a conductive line over the semiconductor substrate. The conductive line has a barrier region surrounding an inner portion of the conductive line, and the barrier region has a greater dopant concentration than the inner portion. The semiconductor device structure also includes a conductive via on the conductive line. The semiconductor device structure further includes a dielectric layer over the semiconductor substrate. The dielectric layer surrounds the conductive line and the conductive via.Type: GrantFiled: July 20, 2022Date of Patent: May 13, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tai-I Yang, Wei-Chen Chu, Yung-Hsu Wu, Chung-Ju Lee
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Patent number: 12302761Abstract: A device includes a first dielectric layer, a magnetic tunnel junction (MTJ), an oxide layer, a cap layer, and a second dielectric layer. The MTJ is over the first dielectric layer. The oxide layer is over the first dielectric layer. The cap layer is over the first dielectric layer. The cap layer is in contact with a sidewall of the MTJ and a sidewall of the oxide layer. The second dielectric layer is over the cap layer.Type: GrantFiled: September 25, 2023Date of Patent: May 13, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsi-Wen Tien, Wei-Hao Liao, Pin-Ren Dai, Chih-Wei Lu, Chung-Ju Lee
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Patent number: 12300611Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a first interconnect dielectric layer arranged over a substrate, a second interconnect dielectric layer arranged over the first interconnect dielectric layer, and an interconnect conductive structure arranged within the second interconnect dielectric layer. The interconnect conductive structure includes an outer portion that includes a first conductive material. Further, the interconnect conductive structure includes a central portion having outermost sidewalls surrounding by the outer portion of the interconnect conductive structure. The central portion includes a second conductive material different than the first conductive material.Type: GrantFiled: July 8, 2021Date of Patent: May 13, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Teng Dai, Hsi-Wen Tien, Wei-Hao Liao, Hsin-Chieh Yao, Chih Wei Lu, Chung-Ju Lee
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Patent number: 12266565Abstract: The present disclosure relates to an integrated chip. The integrated chip comprises a dielectric layer over a substrate. A first metal feature is over the dielectric layer. A second metal feature is over the dielectric layer and is laterally adjacent to the first metal feature. A first dielectric liner segment extends laterally between the first metal feature and the second metal feature along an upper surface of the dielectric layer. The first dielectric liner segment extends continuously from along the upper surface of the dielectric layer, to along a sidewall of the first metal feature that faces the second metal feature, and to along a sidewall of the second metal feature that faces the first metal feature. A first cavity is laterally between sidewalls of the first dielectric liner segment and is above an upper surface of the first dielectric liner segment.Type: GrantFiled: June 30, 2022Date of Patent: April 1, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsi-Wen Tien, Chung-Ju Lee, Chih Wei Lu, Hsin-Chieh Yao, Shau-Lin Shue, Yu-Teng Dai, Wei-Hao Liao
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Patent number: 12261121Abstract: A circuit device having an interlayer dielectric with pillar-type air gaps and a method of forming the circuit device are disclosed. In an exemplary embodiment, the method comprises receiving a substrate and depositing a first layer over the substrate. A copolymer layer that includes a first constituent polymer and a second constituent polymer is formed over the first layer. The first constituent polymer is selectively removed from the copolymer layer. A first region of the first layer corresponding to the selectively removed first constituent polymer is etched. The etching leaves a second region of the first layer underlying the second constituent polymer unetched. A metallization process is performed on the etched substrate, and the first layer is removed from the second region to form an air gap. The method may further comprise depositing a dielectric material within the etched first region.Type: GrantFiled: July 28, 2023Date of Patent: March 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih Wei Lu, Chung-Ju Lee, Tien-I Bao
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Publication number: 20250087535Abstract: A method for forming a semiconductor structure includes following operations. A first metallization feature is formed, and a first cap layer is formed over the first metallization feature. A first insulating layer is formed over the first cap layer and the first metallization feature. A first dielectric structure is formed over the first insulating layer. A portion of the first dielectric structure and a portion of the first insulating layer are removed to expose the first cap layer. A second cap layer is formed over the first cap layer and the first metallization feature. A second insulating layer and a patterned second dielectric structure are formed over the substrate. The patterned second dielectric structure includes a trench and a via opening coupled to a bottom of the trench. A second metallization feature is formed in the trench, and a via structure is formed in the via opening.Type: ApplicationFiled: November 22, 2024Publication date: March 13, 2025Inventors: HWEI-JAY CHU, CHIEH-HAN WU, CHENG-HSIUNG TSAI, CHUNG-JU LEE
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Patent number: 12243775Abstract: In one embodiment, a method of forming metal interconnects uses a direct metal etch approach to form and fill the metal gap. The method may include directly etching a metal layer to form metal patterns. The metal patterns may be spaced apart from one another by recesses. A dielectric spacer may be formed extending along the sidewalls of each of the recesses. The recesses may be filled with a conductive material to form a second set of metal patterns. By directly etching the metal film, the technique allows for reduced line width roughness. The disclosed structure may have the advantages of increased reliability, better RC performance and reduced parasitic capacitance.Type: GrantFiled: January 27, 2023Date of Patent: March 4, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsi-Wen Tien, Wei-Hao Liao, Yu-Teng Dai, Hsin-Chieh Yao, Chih-Wei Lu, Chung-Ju Lee
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Publication number: 20250038073Abstract: A package structure and a method for forming the same are provided. The package structure includes a first package structure and a second package structure. The first package structure includes a first device formed over a first substrate. The first device includes a first conductive plug connected to a through substrate via (TSV) structure formed in the first substrate. A buffer layer surrounds the first substrate. A first bonding layer is formed over the first substrate and the buffer layer. The second package structure includes a second device formed over a second substrate. A second bonding layer is formed over the second device. A hybrid bonding structure is between the first package structure and the second package structure by bonding the first bonding layer to the second bonding layer.Type: ApplicationFiled: July 27, 2023Publication date: January 30, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ke-Han SHEN, Chih-Yuan CHEN, Jiung WU, Hung-Yi Kuo, Chung-Ju LEE, Tung-He CHOU, Ji CUI, Kuo-Chung YEE, Chen-Hua YU, Cheng-Chieh HSIEH, Yu-Jen LIEN, Yian-Liang KUO, Shih-Hao TSENG, Jen Yu WANG, Tzu-Chieh Chou
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Publication number: 20250009081Abstract: A wearable device includes a host and a head strap module. The host has a pair of host connecting ends. The head strap module includes a head strap body and a pair of strengthening assemblies. The head strap body has a pair of head strap connecting ends. The pair of head strap connecting ends are respectively detachably assembled to the pair of host connecting ends. Each of the pair of strengthening assemblies has an outer cover and an inner cover. The outer cover and the corresponding inner cover are connected to each other to jointly cover and hold the corresponding host connecting end and the corresponding head strap connecting end. In addition, a head strap module applied to a wearable device is also provided.Type: ApplicationFiled: March 27, 2024Publication date: January 9, 2025Applicant: HTC CorporationInventors: Chien Min Lin, Chih-Yao Chang, Tsen-Wei Kung, Chung-Ju Wu, Tsung-Hua Yang
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Publication number: 20240415246Abstract: A wearable device includes a host, a side head strap module, and an upper head strap module. The host has a sliding rail. The side head strap module is connected to the host. The upper head strap module includes a sliding base, a front buckle, and an upper head strap. The sliding base is detachably coupled to the sliding rail and slides along the sliding rail. The sliding rail has a first engaging part. The sliding base has a second engaging part. An engagement between the first engaging part and the second engaging part temporarily fixes the sliding base to the sliding rail. The front buckle is pivotally connected to the sliding base. The upper head strap is connected between the side head strap module and the front buckle. In addition, an upper head strap module applied to the wearable device is also proposed.Type: ApplicationFiled: April 15, 2024Publication date: December 19, 2024Applicant: HTC CorporationInventors: Chih-Yao Chang, Tsen-Wei Kung, Chung-Ju Wu, Tsung-Hua Yang, Chien Min Lin
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Publication number: 20240415787Abstract: The present invention relates to a pharmaceutical composition or a health functional food for treating or preventing obesity or obesity-related liver disease, containing a verbenone derivative and a pharmaceutically acceptable salt thereof as an active ingredient. Specifically, the verbenone derivative of the present invention is capable of treating and preventing obesity or obesity-related liver disease by inhibiting TGF-?/Smad3 signaling in high-fat diet-induced mice.Type: ApplicationFiled: August 30, 2022Publication date: December 19, 2024Inventors: Chung JU, Dong Won LEE, Seung Kyu LEE, Sung CHUNG