Patents by Inventor Chung-liang Chao

Chung-liang Chao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11984356
    Abstract: A semiconductor device with liner-free contact structures and a method of fabricating the same are disclosed. The method includes forming first and second source/drain (S/D) regions on first and second fin structures, forming a first dielectric layer between the first and second S/D regions, forming first and second gate-all-around (GAA) structures on the first and second fin structures, forming a second dielectric layer on the first and second GAA structures and the first dielectric layer, forming a tapered trench opening in the second dielectric layer and on the first and second GAA structures and the first dielectric layer, selectively forming a seed layer on top surfaces of the first and second GAA structures and the first dielectric layer that are exposed in the tapered trench opening, and selectively depositing a conductive layer on the seed layer to fill the tapered trench opening.
    Type: Grant
    Filed: November 4, 2021
    Date of Patent: May 14, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Peng-Soon Lim, Chung-Liang Cheng, Huang-Lin Chao
  • Publication number: 20240150192
    Abstract: A semiconductor device with different configurations of gate structures and a method of fabricating the same are disclosed. The method includes forming a fin structure on a substrate, forming a gate opening on the fin structure, forming a metallic oxide layer within the gate opening, forming a first dielectric layer on the metallic oxide layer, forming a second dielectric layer on the first dielectric layer, forming a work function metal (WFM) layer on the second dielectric layer, and forming a gate metal fill layer on the WFM layer. The forming the first dielectric layer includes depositing an oxide material with an oxygen areal density less than an oxygen areal density of the metallic oxide layer.
    Type: Application
    Filed: January 12, 2024
    Publication date: May 9, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsiang-Pi CHANG, Chung-Liang Cheng, I-Ming Chang, Yao-Sheng Huang, Huang-Lin Chao
  • Patent number: 11978674
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first source/drain epitaxial feature formed over a substrate, a second source/drain epitaxial feature formed over the substrate, two or more semiconductor layers disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature, a gate electrode layer surrounding a portion of one of the two or more semiconductor layers, a first dielectric region disposed in the substrate and in contact with a first side of the first source/drain epitaxial feature, and a second dielectric region disposed in the substrate and in contact with a first side of the second source/drain epitaxial feature, the second dielectric region being separated from the first dielectric region by a substrate.
    Type: Grant
    Filed: October 8, 2021
    Date of Patent: May 7, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: I-Ming Chang, Jung-Hung Chang, Chung-Liang Cheng, Hsiang-Pi Chang, Yao-Sheng Huang, Huang-Lin Chao
  • Publication number: 20240090232
    Abstract: A ferroelectric memory cell (FeRAM) is disclosed that includes an active device (e.g., a transistor) and a passive device (e.g., a ferroelectric capacitor) integrated in a substrate. The transistor and its gate contacts are formed on a front side of the substrate. A carrier wafer can be bonded to the active device to allow the active device to be inverted so that the passive device and associated contacts can be electrically coupled from a back side of the substrate.
    Type: Application
    Filed: November 16, 2023
    Publication date: March 14, 2024
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang CHENG, Huang-Lin CHAO
  • Publication number: 20240088227
    Abstract: The structure of a semiconductor device with different gate structures configured to provide ultra-low threshold voltages and a method of fabricating the semiconductor device are disclosed. The method includes forming first and second nanostructured channel regions in first and second nanostructured layers, respectively, and forming first and second gate-all-around (GAA) structures surrounding the first and second nanostructured channel regions, respectively. The forming the first and second GAA structures includes selectively forming an Al-based n-type work function metal layer and a Si-based capping layer on the first nanostructured channel regions, depositing a bi-layer of Al-free p-type work function metal layers on the first and second nanostructured channel regions, depositing a fluorine blocking layer on the bi-layer of Al-free p-type work function layers, and depositing a gate metal fill layer on the fluorine blocking layer.
    Type: Application
    Filed: November 21, 2023
    Publication date: March 14, 2024
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang CHENG, Chun-I WU, Huang-Lin CHAO
  • Patent number: 11925033
    Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a first and second transistors arranged over a substrate. The first transistor includes first channel structures extending between first and second source/drain regions. A first gate electrode is arranged between the first channel structures, and a first protection layer is arranged over a topmost one of the first channel structures. The second transistor includes second channel structures extending between the second source/drain region and a third source/drain region. A second gate electrode is arranged between the second channel structures, and a second protection layer is arranged over a topmost one of the second channel structures. The integrated chip further includes a first interconnect structure arranged between the substrate and the first and second channel structures, and a contact plug structure coupled to the second source/drain region and arranged above the first and second gate electrodes.
    Type: Grant
    Filed: March 30, 2021
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuan-Liang Liu, Sheng-Chau Chen, Chung-Liang Cheng, Chia-Shiung Tsai, Yeong-Jyh Lin, Pinyen Lin, Huang-Lin Chao
  • Patent number: 5223879
    Abstract: A hair-style simulation cassette has a back strip, a U-shaped frame fixed to the back strip, a panel fixed to the U-shaped frame, a film fixed to the panel, and a photograph carrier receivable in the U-shaped frame. The photograph carrier has a cavity for receiving a photograph. The panel has a viewing window through which the photograph is visible and an adjusting window through which the photograph is adjustable.
    Type: Grant
    Filed: May 4, 1992
    Date of Patent: June 29, 1993
    Inventor: Chung-Liang Chao
  • Patent number: 5175934
    Abstract: A utility knife switchable between a non-rotatable mode for cutting a straight line and a rotatable mode for cutting a curved line includes a rod which engages to a blade at one end and the other end being rotatably positioned against a bearing device thereby providing the blade with a rotation axle for cutting a curve. A switching button device is installed above the limiting device for forcing the rod and the blade to work in a non-rotatable mode or a rotatable mode.
    Type: Grant
    Filed: May 21, 1992
    Date of Patent: January 5, 1993
    Inventor: Chung-liang Chao