Abstract: The present invention discloses a method for enhancing hardness of a nanoimprint mold comprising following steps of: providing a male mold, composed of a first material, for imprinting a female mold and producing a nano structural pattern on the female mold, and the female mold composed of a second material, wherein the hardness of the first material is higher than the hardness of the second material; applying a nano-indentation technique to the female mold onto the female mold by a nano-indentation apparatus having a diamond array probe so as to enhance the surface hardness of the female mold; and impressing a substrate by the female mold with the nano structural pattern having the enhanced surface.

Abstract: The present invention discloses a method for generating nano patterns upon material surfaces. The method for generating nano patterns upon material surfaces comprises the following steps: providing a thin film capable of controlling lattice directions, applying a nanoindentation action to the thin film to generate an indentation at a specific position on the thin film. At least one hillock is then generated in a specific direction to generate a pattern and to be applied to a data storage system.

Abstract: The present invention discloses a method for enhancing hardness of a nanoimprint mold comprising following steps of: providing a male mold, composed of a first material, for imprinting a female mold and producing a nano structural pattern on the female mold, and the female mold composed of a second material, wherein the hardness of the first material is higher than the hardness of the second material; applying a nano-indentation technique to the female mold onto the female mold by a nano-indentation apparatus having a diamond array probe so as to enhance the surface hardness of the female mold; and impressing a substrate by the female mold with the nano structural pattern having the enhanced surface.

Abstract: The present invention discloses a hardness enhancing apparatus for use in a nanoimprint mold, comprising a female mold, a male mold and a hardness enhancing portion. The male mold composed of a first material is used to imprint a female mold so as to produce a nano structural pattern on the female mold. The female mold is composed of a second material, and the hardness of the first material is higher than the hardness of the second material. The hardness enhancing portion that utilizes a nano-indentation apparatus above the female mold applies the nano-indentation technique to the female mold in order to enhance the surface hardness of the second material.

Abstract: The present invention discloses a method for generating nano patterns upon material surfaces. The method for generating nano patterns upon material surfaces comprises the following steps: providing a thin film capable of controlling lattice directions, applying a nanoindentation action to the thin film to generate an indentation at a specific position on the thin film. At least one hillock is then generated in a specific direction to generate a pattern and to be applied to a data storage system.