Patents by Inventor Chung-Yu Lu
Chung-Yu Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250149486Abstract: A method includes forming a first conductive pillar on an interposer; forming a second conductive pillar on the interposer, wherein the second conductive pillar includes a barrier layer; bonding a first semiconductor device to the first conductive pillar by a first bonding region that includes more inter-metallic compound than solder; and bonding the first semiconductor device to the second conductive pillar by a second bonding region that includes more solder than inter-metallic compound.Type: ApplicationFiled: February 6, 2024Publication date: May 8, 2025Inventors: Yao-Jen Chang, Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu, Hsien-Pin Hu
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Publication number: 20240371782Abstract: Board substrates, three-dimensional integrated circuit structures and methods of forming the same are disclosed. A board substrate includes a core layer, a first build-up layer, a second build-up layer, a first group of bumps, a second first group of bumps and at least one first underfill blocking wall. The first build-up layer and the second build-up layer are disposed on opposite sides of the core layer. The first group of bumps is disposed over the first build-up layer. The second first group of bumps is disposed over the first build-up layer. The at least one first underfill blocking wall is disposed over the first build-up layer and between the first group of bumps and the second group of bumps.Type: ApplicationFiled: July 17, 2024Publication date: November 7, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu
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Patent number: 12113027Abstract: Board substrates, three-dimensional integrated circuit structures and methods of forming the same are disclosed. A board substrate includes a core layer, a first build-up layer, a second build-up layer, a first group of bumps, a second first group of bumps and at least one first underfill blocking wall. The first build-up layer and the second build-up layer are disposed on opposite sides of the core layer. The first group of bumps is disposed over the first build-up layer. The second first group of bumps is disposed over the first build-up layer. The at least one first underfill blocking wall is disposed over the first build-up layer and between the first group of bumps and the second group of bumps.Type: GrantFiled: June 27, 2023Date of Patent: October 8, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu
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Publication number: 20240153843Abstract: A package structure is provided. The package structure includes a semiconductor die and a thermoelectric structure disposed on the semiconductor die. The thermoelectric structure includes P-type semiconductor blocks, N-type semiconductor blocks and metal pads. The P-type semiconductor blocks and the N-type semiconductor blocks are arranged in alternation with the metal pads connecting the P-type semiconductor blocks and the N-type semiconductor blocks. When a current flowing through one of the N-type semiconductor block, one of the metal pad, and one of the P-type semiconductor block in order, the metal pad between the N-type semiconductor block and the P-type semiconductor block forms a cold junction which absorbs heat generated by the semiconductor die.Type: ApplicationFiled: January 17, 2024Publication date: May 9, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Yen Hsieh, Chih-Horng Chang, Chung-Yu Lu
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Patent number: 11915994Abstract: A package structure is provided. The package structure includes a semiconductor die and a thermoelectric structure disposed on the semiconductor die. The thermoelectric structure includes P-type semiconductor blocks, N-type semiconductor blocks and metal pads. The P-type semiconductor blocks and the N-type semiconductor blocks are arranged in alternation with the metal pads connecting the P-type semiconductor blocks and the N-type semiconductor blocks. When a current flowing through one of the N-type semiconductor block, one of the metal pad, and one of the P-type semiconductor block in order, the metal pad between the N-type semiconductor block and the P-type semiconductor block forms a cold junction which absorbs heat generated by the semiconductor die.Type: GrantFiled: August 12, 2021Date of Patent: February 27, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Yen Hsieh, Chih-Horng Chang, Chung-Yu Lu
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Patent number: 11901306Abstract: Semiconductor structures are provided. A semiconductor structure includes a plurality of product regions over a semiconductor substrate, a plurality of alignment regions over the semiconductor substrate, and a plurality of first features formed in a material layer over the semiconductor substrate. Each of the alignment regions is surrounded by four of the product regions of a group, and each of the first features extends across two adjacent product regions in the group. The product regions are disposed in rows and columns of a first array, and the alignment regions are disposed in rows and columns of a second array, and the first and second arrays have a same center point.Type: GrantFiled: November 9, 2022Date of Patent: February 13, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Yu Lu, Yao-Jen Chang, Sao-Ling Chiu
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Patent number: 11810793Abstract: One embodiment includes partially forming a first through via in a substrate of an interposer, the first through via extending into a first side of the substrate of the interposer. The method also includes bonding a first die to the first side of the substrate of the interposer. The method also includes recessing a second side of the substrate of the interposer to expose the first through via, the first through via protruding from the second side of the substrate of the interposer, where after the recessing, the substrate of the interposer is less than 50 ?m thick. The method also includes and forming a first set of conductive bumps on the second side of the substrate of the interposer, at least one of the first set of conductive bumps being electrically coupled to the exposed first through via.Type: GrantFiled: July 26, 2022Date of Patent: November 7, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu, Shang-Yun Hou
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Publication number: 20230335502Abstract: Board substrates, three-dimensional integrated circuit structures and methods of forming the same are disclosed. A board substrate includes a core layer, a first build-up layer, a second build-up layer, a first group of bumps, a second first group of bumps and at least one first underfill blocking wall. The first build-up layer and the second build-up layer are disposed on opposite sides of the core layer. The first group of bumps is disposed over the first build-up layer. The second first group of bumps is disposed over the first build-up layer. The at least one first underfill blocking wall is disposed over the first build-up layer and between the first group of bumps and the second group of bumps.Type: ApplicationFiled: June 27, 2023Publication date: October 19, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu
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Patent number: 11728278Abstract: Board substrates, three-dimensional integrated circuit structures and methods of forming the same are disclosed. A board substrate includes a core layer, a first build-up layer, a second build-up layer, a first group of bumps, a second first group of bumps and at least one first underfill blocking wall. The first build-up layer and the second build-up layer are disposed on opposite sides of the core layer. The first group of bumps is disposed over the first build-up layer. The second first group of bumps is disposed over the first build-up layer. The at least one first underfill blocking wall is disposed over the first build-up layer and between the first group of bumps and the second group of bumps.Type: GrantFiled: September 5, 2019Date of Patent: August 15, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu
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Publication number: 20230112229Abstract: Semiconductor structures are provided. A semiconductor structure includes a plurality of product regions over a semiconductor substrate, a plurality of alignment regions over the semiconductor substrate, and a plurality of first features formed in a material layer over the semiconductor substrate. Each of the alignment regions is surrounded by four of the product regions of a group, and each of the first features extends across two adjacent product regions in the group. The product regions are disposed in rows and columns of a first array, and the alignment regions are disposed in rows and columns of a second array, and the first and second arrays have a same center point.Type: ApplicationFiled: November 9, 2022Publication date: April 13, 2023Inventors: Chung-Yu LU, Yao-Jen CHANG, Sao-Ling CHIU
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Publication number: 20230051881Abstract: A package structure is provided. The package structure includes a semiconductor die and a thermoelectric structure disposed on the semiconductor die. The thermoelectric structure includes P-type semiconductor blocks, N-type semiconductor blocks and metal pads. The P-type semiconductor blocks and the N-type semiconductor blocks are arranged in alternation with the metal pads connecting the P-type semiconductor blocks and the N-type semiconductor blocks. When a current flowing through one of the N-type semiconductor block, one of the metal pad, and one of the P-type semiconductor block in order, the metal pad between the N-type semiconductor block and the P-type semiconductor block forms a cold junction which absorbs heat generated by the semiconductor die.Type: ApplicationFiled: August 12, 2021Publication date: February 16, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Yen Hsieh, Chih-Horng Chang, Chung-Yu Lu
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Publication number: 20220367208Abstract: One embodiment includes partially forming a first through via in a substrate of an interposer, the first through via extending into a first side of the substrate of the interposer. The method also includes bonding a first die to the first side of the substrate of the interposer. The method also includes recessing a second side of the substrate of the interposer to expose the first through via, the first through via protruding from the second side of the substrate of the interposer, where after the recessing, the substrate of the interposer is less than 50 ?m thick. The method also includes and forming a first set of conductive bumps on the second side of the substrate of the interposer, at least one of the first set of conductive bumps being electrically coupled to the exposed first through via.Type: ApplicationFiled: July 26, 2022Publication date: November 17, 2022Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu, Shang-Yun Hou
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Patent number: 11502043Abstract: Method for fabricating a semiconductor structure is provided. First features are formed in a first product region of each die area and in a material layer through a first mask. Second features are formed in a second product region of each die area and in the material layer through a second mask. Third features are formed in a third product region of each die area and in the material layer through a third mask. Fourth features are formed in a fourth product region of each die area and in the material layer through a fourth mask. Fifth features are formed in an alignment region between the first, second, third and fourth product regions of each die area and in the material layer through the first, second, third and fourth masks. The first product region is free of the second, third, and fourth features.Type: GrantFiled: April 9, 2021Date of Patent: November 15, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Yu Lu, Yao-Jen Chang, Sao-Ling Chiu
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Patent number: 11495472Abstract: One embodiment includes partially forming a first through via in a substrate of an interposer, the first through via extending into a first side of the substrate of the interposer. The method also includes bonding a first die to the first side of the substrate of the interposer. The method also includes recessing a second side of the substrate of the interposer to expose the first through via, the first through via protruding from the second side of the substrate of the interposer, where after the recessing, the substrate of the interposer is less than 50 ?m thick. The method also includes and forming a first set of conductive bumps on the second side of the substrate of the interposer, at least one of the first set of conductive bumps being electrically coupled to the exposed first through via.Type: GrantFiled: October 7, 2020Date of Patent: November 8, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu, Shang-Yun Hou
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Publication number: 20210327723Abstract: One embodiment includes partially forming a first through via in a substrate of an interposer, the first through via extending into a first side of the substrate of the interposer. The method also includes bonding a first die to the first side of the substrate of the interposer. The method also includes recessing a second side of the substrate of the interposer to expose the first through via, the first through via protruding from the second side of the substrate of the interposer, where after the recessing, the substrate of the interposer is less than 50 ?m thick. The method also includes and forming a first set of conductive bumps on the second side of the substrate of the interposer, at least one of the first set of conductive bumps being electrically coupled to the exposed first through via.Type: ApplicationFiled: October 7, 2020Publication date: October 21, 2021Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu, Shang-Yun Hou
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Publication number: 20210233863Abstract: Method for fabricating a semiconductor structure is provided. First features are formed in a first product region of each die area and in a material layer through a first mask. Second features are formed in a second product region of each die area and in the material layer through a second mask. Third features are formed in a third product region of each die area and in the material layer through a third mask. Fourth features are formed in a fourth product region of each die area and in the material layer through a fourth mask. Fifth features are formed in an alignment region between the first, second, third and fourth product regions of each die area and in the material layer through the first, second, third and fourth masks. The first product region is free of the second, third, and fourth features.Type: ApplicationFiled: April 9, 2021Publication date: July 29, 2021Inventors: Chung-Yu LU, Yao-Jen CHANG, Sao-Ling CHIU
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Patent number: 10978404Abstract: Method for fabricating a semiconductor structure is provided. First features are formed in a first product region of each die area in a material layer through a first mask. Second features are formed in a second product region of each die area in the material layer through a second mask. Third features are formed in a third product region of each die area in the material layer through a third mask. Fourth features are formed in a fourth product region of each die area in the material layer through a fourth mask. Fifth features are formed in an alignment region of each die area in the material layer through the first through fourth masks. The first product region is adjacent to and in physical contact with the second and third product regions, and the first product region is free of the second, third, and fourth features.Type: GrantFiled: August 22, 2019Date of Patent: April 13, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Yu Lu, Yao-Jen Chang, Sao-Ling Chiu
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Publication number: 20210057350Abstract: Method for fabricating a semiconductor structure is provided. First features are formed in a first product region of each die area in a material layer through a first mask. Second features are formed in a second product region of each die area in the material layer through a second mask. Third features are formed in a third product region of each die area in the material layer through a third mask. Fourth features are formed in a fourth product region of each die area in the material layer through a fourth mask. Fifth features are formed in an alignment region of each die area in the material layer through the first through fourth masks. The first product region is adjacent to and in physical contact with the second and third product regions, and the first product region is free of the second, third, and fourth features.Type: ApplicationFiled: August 22, 2019Publication date: February 25, 2021Inventors: Chung-Yu LU, Yao-Jen CHANG, Sao-Ling CHIU
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Publication number: 20200312770Abstract: Board substrates, three-dimensional integrated circuit structures and methods of forming the same are disclosed. A board substrate includes a core layer, a first build-up layer, a second build-up layer, a first group of bumps, a second first group of bumps and at least one first underfill blocking wall. The first build-up layer and the second build-up layer are disposed on opposite sides of the core layer. The first group of bumps is disposed over the first build-up layer. The second first group of bumps is disposed over the first build-up layer. The at least one first underfill blocking wall is disposed over the first build-up layer and between the first group of bumps and the second group of bumps.Type: ApplicationFiled: September 5, 2019Publication date: October 1, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu
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Patent number: 10262939Abstract: Various structures having a fuse and methods for forming those structures are described. An embodiment is a method. The method comprises attaching a first die to a first side of a component using first electrical connectors. After the attaching, at least one of (i) the first die comprises a first fuse, (ii) the first side of the component comprises a second fuse, (iii) a second side of the component comprises a third fuse, the second side being opposite the first side, or (iv) a combination thereof. The method further comprises after the attaching the first die to the first side of the component, blowing the first fuse, the second fuse, the third fuse, or a combination thereof.Type: GrantFiled: December 14, 2016Date of Patent: April 16, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Yu Lu, Hsien-Pin Hu, Shin-Puu Jeng, Shang-Yun Hou, Tzuan-Horng Liu, Shih-Wen Huang, Chun Hua Chang