Abstract: An electrostatic chuck is described that has radio frequency coupling suitable for use in high power plasma environments. In some examples, the chuck includes a base plate, a top plate, a first electrode in the top plate proximate the top surface of the top plate to electrostatically grip a workpiece, and a second electrode in the top plate spaced apart from the first electrode, the first and second electrodes being coupled to a power supply to electrostatically charge the first electrode.

Abstract: A method of acoustic echo suppression using a recurrent neural network, performed by at least one processor, is provided. The method includes receiving a microphone signal and a far-end reference signal, estimating an echo suppressed signal and an echo signal based on the microphone signal and the far-end reference signal, estimating enhancement filters for the microphone signal based on the echo suppressed signal and the echo signal, generating an enhanced signal based on the enhancement filters, and adjusting the enhanced signal using automatic gain control (AGC) and outputting the adjusted signal.

Abstract: A method of acoustic echo suppression using a recurrent neural network, performed by at least one processor, is provided. The method includes receiving a microphone signal and a far-end reference signal, estimating an echo suppressed signal and an echo signal based on the microphone signal and the far-end reference signal, estimating enhancement filters for the microphone signal based on the echo suppressed signal and the echo signal, generating an enhanced signal based on the enhancement filters, and adjusting the enhanced signal using automatic gain control (AGC) and outputting the adjusted signal.

Abstract: An advanced temperature control system and method are described for a wafer carrier in a plasma processing chamber. In one example a heat exchanger provides a temperature controlled thermal fluid to a fluid channel of a workpiece carrier and receives the thermal fluid from the fluid channel. A proportional valve is between the heat exchanger and the fluid channel to control the rate of flow of thermal fluid from the heat exchanger to the fluid channel. A pneumatic valve is also between the heat exchanger and the fluid channel also to control the rate of flow of thermal fluid from the heat exchanger and the fluid channel. A temperature controller receives a measured temperature from a thermal sensor of the carrier and controls the proportional valve and the pneumatic valve in response to the measured temperature to adjust the rate of flow of the thermal fluid.

Abstract: An energy storage apparatus, including a plurality of battery modules, a switch unit, a start unit; and an electrical energy output port. The energy storage apparatus is configured for use in a photovoltaic power generation system having a plurality of photovoltaic modules, a direct current-to-direct current (DC/DC) converter, and a direct current-to-alternating current (DC/AC) converter. The plurality of battery modules is separately connected to the start unit and the switch unit, and the plurality of battery modules are configured to, when the start unit receives a start signal, control the switch unit to be turned on. The energy storage apparatus is configured to, in response to the switch unit being turned on, output electrical energy of the plurality of battery modules through the electrical energy output port, and, in response to the switch unit being turned off, disconnect the plurality of battery modules from the electrical energy output port.

Abstract: A method of end-to-end speaker diarization (EESD) using neural speaker clustering, performed by at least one processor, is provided. The method includes generating a set of speech labels corresponding to a set of speakers based on an input stream. The speech labels indicate whether dialogue of a speaker is speech or non-speech. The method further includes generating dialogue based on the set of speakers, extracting speaker embeddings from the dialogue, mapping the speaker embeddings to a cluster identification (ID), an overlapped speech value, or a non-speech value based on a neural network, and outputting EESD labels based on the mapping.

Abstract: This application describes an energy storage system including an energy storage module, a direct current bus, a power conversion module, a first power supply module, a second power supply module, and a battery management system. In some implementations, the first power supply module is configured to: select a larger voltage between an output direct current voltage of the energy storage module and a bus voltage of the direct current bus as an input voltage, and output a first direct current voltage. The first power conversion module is configured to: convert the alternating current mains or an output alternating current voltage of the power conversion module into a second direct current voltage. The second power supply module is configured to: select a larger voltage between the first direct current voltage and the second direct current voltage as a target voltage, and supply power to the battery management system based on the target voltage.

Abstract: A method of acoustic echo suppression using a recurrent neural network, performed by at least one processor, is provided. The method includes receiving a microphone signal and a far-end reference signal, estimating an echo suppressed signal and an echo signal based on the microphone signal and the far-end reference signal, estimating enhancement filters for the microphone signal based on the echo suppressed signal and the echo signal, generating an enhanced signal based on the enhancement filters, and adjusting the enhanced signal using automatic gain control (AGC) and outputting the adjusted signal.

Abstract: An advanced temperature control system and method are described for a wafer carrier in a plasma processing chamber. In one example a heat exchanger provides a temperature controlled thermal fluid to a fluid channel of a workpiece carrier and receives the thermal fluid from the fluid channel. A proportional valve is between the heat exchanger and the fluid channel to control the rate of flow of thermal fluid from the heat exchanger to the fluid channel. A pneumatic valve is also between the heat exchanger and the fluid channel also to control the rate of flow of thermal fluid from the heat exchanger and the fluid channel. A temperature controller receives a measured temperature from a thermal sensor of the carrier and controls the proportional valve and the pneumatic valve in response to the measured temperature to adjust the rate of flow of the thermal fluid.

Abstract: A method, system, apparatus, and computer-readable medium for voice conversion using a conditional disentangled sequential variational auto-encoder (C-DSVAE) is provided. The method, performed by at least one processor, includes receiving input speech segments, encoding the input speech segments via a shared encoder to generate a speaker embedding and a content embedding, and encoding a posterior distribution of the speaker embedding via a speaker encoder and encoding a posterior distribution of the content embedding via a content encoder to obtain encoded results. The method further includes enabling a content bias, reshaping the content embedding using the content bias, and generating a reconstructed speech output based on the encoded results and the reshaped content embedding.

Abstract: A method, apparatus, and non-transitory computer-readable medium for automatic speech recognition using conditional factorization for bilingual code-switched and monolingual speech may include receiving an audio observation sequence comprising a plurality of frames, the audio observation sequence including audio in a first language or a second language. The approach may further include mapping the audio observation sequence into a first sequence of hidden representations, the mapping being generated by a first encoder corresponding to the first language and mapping the audio observation sequence into a second sequence of hidden representations, the mapping being generated by a second encoder corresponding to the second language. The approach may further include generating a label-to-frame sequence based on the first sequence of hidden representations and the second sequence of hidden representations, using a joint neural network based model.

Abstract: A method includes receiving, by a first encoder, an original speech segment, receiving, by a second encoder, an augmented speech segment of the original speech segment, generating, by the first encoder, a first speaker representation based on the original speech segment, generating, by the second encoder, a second speaker representation based on the augmented speech segment, and generating a contrastive loss based on the first speaker representation and the second speaker representation.

Abstract: An abrasive water jet nozzle for strengthening, including a chamber, providing a mixing space; and a strengthening mixing assembly, providing a strengthening mixing of water with an abrasive entering the chamber, wherein the strengthening mixing assembly includes a fluid passage and a water stopper block, wherein the water stopper block is located at an eccentric position on one side of the chamber, and an outlet of the fluid passage faces the water stopper block. The provided abrasive water jet nozzle is capable of fully mixing high speed water with the abrasive particles after the high speed water entering the mixing chamber, so as to ensure the uniformity of the strengthening effect, and the formed abrasive water jet is a large circular fan-shaped jet, which can greatly improve the strengthening quality of the abrasive water jet.

Abstract: A method for disentangled variational speech representation learning for voice conversion, performed by at least one processor, is provided. The method includes receiving input speech segments, encoding the input speech segments via a shared encoder to generate a speaker embedding and a content embedding, encoding the posterior distributions of the speaker embedding via a speaker encoder and encoding the posterior distributions of the content embedding via a content encoder to obtain encoded results, and decoding the encoded results by concatenating the encoded results to obtain a reconstructed speech output.

Abstract: This application provides a message processing method and system, and a user plane function UPF device. The method includes: receiving user equipment (UE) authentication information sent by a session management function (SMF) device; matching a received uplink message of the UE with the UE authentication information, and if the matching succeeds, sending the uplink message that includes the UE authentication information to a first application (APP); and performing authentication by the first APP on the UE according to the UE authentication information. In the foregoing process, authentication on the UE does not need to be performed by a remote APP. This simplifies the authentication process, reduces network resource overhead, speeds up authentication on UEs, reduces the latency of UE authentication, and further increases the application switching speed.

Abstract: A substrate processing system includes a process chamber, one or more robot, a substrate measurement system, and a computing device. The process chamber may process a substrate that will comprise a film and/or feature after the processing. The one or more robot, to move the substrate from the process chamber to a substrate measurement system. The substrate measurement system may measure the film and/or feature on the substrate and generate a profile map of the film and/or feature. The computing device may process data from the profile map using a first trained machine learning model, wherein the first trained machine learning model outputs a first chamber component condition estimation for a first chamber component of the process chamber. The computing device may then determine whether to perform maintenance on the first chamber component of the process chamber based at least in part on the first chamber component condition estimation.

Abstract: A method includes processing a substrate in a process chamber according to a recipe, wherein the substrate comprises at least one of a film or a feature after the processing. The method further includes generating a profile map of the first substrate. The method further includes processing data from the profile map using a first model, wherein the first model outputs at least one of an estimated mesa condition of a substrate support for the process chamber, an estimated lift pin location condition of the substrate support an estimated seal band condition of the substrate support, or an estimated process kit ring condition for a process kit ring for the process chamber. The method further includes outputting a notice as a result of the processing.

Abstract: A method includes receiving data indicative of properties of a substrate support from one or more sensors of a removable sensor assembly disposed proximate to the substrate support. The method further includes providing data based on the data indicative of properties of a substrate support to a physics-based model of the substrate support. The method further includes receiving predicted performance data of the substrate support from the physics-based model.