Abstract: A MEMS-based atmospheric electric field sensor on the ground includes an arc-roof detection structure and a MEMS electric field measuring module. The arc-roof detection structure includes an electric conducting arc-roof rainproof housing, an electric conducting connecting column, a fixing-supporting chamber body upper part, and a fixing-supporting chamber body lower part. The top part of the electric conducting arc-roof rainproof housing is arc-shaped, and the bottom part of the same is provided with a groove facing towards the top part. The electric conducting connecting column is arranged on a top part of the groove and electrically connected to the arc-roof rainproof housing. The fixing-supporting chamber body upper part is a barrel in the groove. The fixing-supporting chamber body closes the bottom opening of the fixing-supporting chamber body upper part to form a fixing-supporting chamber body. The MEMS electric field measuring module is provided inside the fixing-supporting chamber body.

Abstract: A high resistivity material-based packaging element for an electric field sensor comprises: a substrate; a first packaging frame fixed to the substrate; and a first packaging cover fixed to the packaging frame; wherein at least one electric field sensor chip is located in an inner cavity formed by the substrate, the first packaging frame, and the first packaging cover, and at least one of the substrate, the first packaging frame, and the first packaging cover is of a high resistivity material having an electrical resistivity equal to or greater than 108?·cm. The present invention can ensure accurate measurement of the electric field, and provide an approach to solve the problem of environmental adaptability, thereby enhancing the stability and reliability of electric field detection.

Abstract: A MEMS-based atmospheric electric field sensor on the ground includes an arc-roof detection structure and a MEMS electric field measuring module. The arc-roof detection structure includes an electric conducting arc-roof rainproof housing, an electric conducting connecting column, a fixing-supporting chamber body upper part, and a fixing-supporting chamber body lower part. The top part of the electric conducting arc-roof rainproof housing is arc-shaped, and the bottom part of the same is provided with a groove facing towards the top part. The electric conducting connecting column is arranged on a top part of the groove and electrically connected to the arc-roof rainproof housing. The fixing-supporting chamber body upper part is a barrel in the groove. The fixing-supporting chamber body closes the bottom opening of the fixing-supporting chamber body upper part to form a fixing-supporting chamber body. The MEMS electric field measuring module is provided inside the fixing-supporting chamber body.

Abstract: A rotary resonant three-dimensional electric field sensor is disclosed. The rotary resonant three-dimensional electric field sensor includes: a substrate (1); an X-direction electric field measurement unit (4), a Y-direction electric field measurement unit (5), and a Z-direction electric field measurement unit (6), set on the substrate (1), each of which including: a sensing electrode (8, 10, 13) fixed on the substrate (1), and a shielding electrode (7, 9, 12) vibrating relatively to the sensing electrode (8, 10, 13); and at least one set of driving mechanical structures (11, 18), is configured to generate a driving force so as to cause the shielding electrode (7, 9) to vibrate relatively to a corresponding sensing electrode (8, 10, 13), and the vibration is transferred to the shielding is electrodes (7, 9, 12) of the other two electric field measurement units (4, 5, 6).

Abstract: A high resistivity material-based packaging element for an electric field sensor comprises: a substrate; a first packaging frame fixed to the substrate; and a first packaging cover fixed to the packaging frame; wherein at least one electric field sensor chip is located in an inner cavity formed by the substrate, the first packaging frame, and the first packaging cover, and at least one of the substrate, the first packaging frame, and the first packaging cover is of a high resistivity material having an electrical resistivity equal to or greater than 108?·cm. The present invention can ensure accurate measurement of the electric field, and provide an approach to solve the problem of environmental adaptability, thereby enhancing the stability and reliability of electric field detection.

Abstract: A rotary resonant three-dimensional electric field sensor is disclosed. The rotary resonant three-dimensional electric field sensor includes: a substrate (1); an X-direction electric field measurement unit (4), a Y-direction electric field measurement unit (5), and a Z-direction electric field measurement unit (6), set on the substrate (1), each of which including: a sensing electrode (8, 10, 13) fixed on the substrate (1), and a shielding electrode (7, 9, 12) vibrating relatively to the sensing electrode (8, 10, 13); and at least one set of driving mechanical structures (11, 18), is configured to generate a driving force so as to cause the shielding electrode (7, 9) to vibrate relatively to a corresponding sensing electrode (8, 10, 13), and the vibration is transferred to the shielding is electrodes (7, 9, 12) of the other two electric field measurement units (4, 5, 6).