Abstract: A processing device to be used in an inspection apparatus for optical inspection of samples is configured to be used with an optical inspection device, to be communicatively coupled to a user interface, to receive input data from the user interface and/or from the optical inspection device, and to provide output data to the user interface, and to be communicatively coupled to at least one other processing device to allow data transfer. The processing device is configured as a master unit, and the at least one other processing device is configured as a slave unit. The processing device is further configured to provide a data storage for storing data received as input and/or to be provided as output, and to allow the at least one other processing device to access the data storage to store data and/or to retrieve data.

Abstract: An antenna includes: a dielectric layer having first and second surfaces opposite to each other; a radiating layer on the first surface, and having therein a slit; a first shielding layer on the second surface, and being electrically connected to the radiating layer; a first insulating layer on an upper side of the radiating layer; and a switch unit on an upper side of the first insulating layer, and corresponding to the slit. Each switch unit includes: a first electrode, a second insulating layer, a connecting portion, and a second electrode on the first insulating layer sequentially. Orthogonal projections of the first and second electrodes on the dielectric layer overlap each other. The connecting portion is connected to the second electrode to form a gap between the first and second electrodes. Orthogonal projections of the second electrode and a corresponding slit on the dielectric layer overlap each other.

Abstract: A processing device to be used for optical inspection of samples is configured to be communicatively coupled to a camera of an optical inspection device and to a user interface, to receive input data from the user interface and/or from the camera, to provide output data to the user interface, to be communicatively coupled to a storage device, to provide instructions, by accessing instruction data stored at the storage device, for optical quality inspection of samples to be performed by a user via the user interface. The instructions include instructions regarding what kind of optical quality inspection to be performed on which sample. The processing device is further configured to receive quality report data from the optical quality inspection via the user interface, and/or image data of images acquired by the camera, and to store the quality report data and/or the image data in the storage device.

Abstract: The present disclosure provides an antenna, an antenna array and a communication system, and belongs to the field of communication technology. The antenna of the present disclosure includes: a phase shifter, including: a dielectric substrate, a first signal electrode, a first reference electrode, a second reference electrode, an interlayer insulating layer, at least one phase control unit; a first transmission structure and a second transmission structure; wherein the first transmission structure is electrically connected to one end of the first signal electrode, and the second transmission structure is electrically connected to the other end of the first signal electrode; and an antenna unit electrically connected to the second transmission structure.

Abstract: An antenna includes: a substrate; a first reference electrode on a first surface of the substrate; a radiating element on a second surface of the substrate, feeding directions of a first port and a second port of the radiating element are different; and at least one transmission structure on the second surface of the substrate and connected to at least one of the first port and the second port. The transmission structure includes: a signal electrode, a second reference electrode on at least one side of the signal electrode, and at least one membrane bridge; the signal electrode feeds a microwave signal into the radiating element, is positioned in a space surrounded by the membrane bridge and the substrate, and is insulated from the membrane bridge through an interlayer dielectric layer; orthographic projections of the membrane bridge and the second reference electrode on the substrate are overlapped.

Abstract: A phase shifter and an antenna device are provided. The phase shifter includes a substrate, a signal line on the substrate, ground lines in pairs on the substrate, and a capacitance adjusting component. Two ground lines in a same pair of ground lines are on both sides of the signal line and spaced apart from the signal line, respectively. The capacitance adjusting component includes a film bridge, and both ends of the film bridge are on the two ground lines, respectively. The signal line is in a space enclosed by the film bridge and the substrate. The capacitance adjusting component is configured to adjust a capacitance between the film bridge and the signal line to a target capacitance when the capacitance adjusting component receives a bias voltage, and the target capacitance has a linear correlation with a magnitude of the bias voltage.

Abstract: The present disclosure provides a phase shifter and an antenna. The phase shifter includes: a substrate; a signal electrode, and a first reference electrode and a second reference electrode respectively on two sides of an extending direction of the signal electrode; an interlayer insulating layer on the signal electrode, the first reference electrode and the second reference electrode; and at least one phase control unit each including a film bridge. At least part of the at least one phase control unit further includes at least one driving structure including at least a driving electrode; at least part of the at least one driving structure has a different height from a height of the signal electrode in a direction away from the substrate; the driving structure in each phase control unit is at least partially overlapped an orthographic projection of the film bridge on the substrate.

Abstract: A MEMS phase shifter, including: a substrate; a coplanar waveguide signal structure on the substrate; two coplanar waveguide ground wires respectively at two sides of the coplanar waveguide signal structure; insulating isolation layers respectively on the two coplanar waveguide ground wires; and a metal film bridge across and over the coplanar waveguide signal structure and forming a gap with the coplanar waveguide signal structure, both ends of the metal film bridge respectively attached to the insulating isolation layers on the two coplanar waveguide ground wires, wherein an insulating dielectric layer is provided on the coplanar waveguide signal structure, and the insulating dielectric layer comprises at least one concave part, which is concave in the direction towards the substrate, on the surface facing the metal film bridge.

Abstract: There is provided a phase shifter including a substrate, a signal line on the substrate, ground lines disposed in pairs on the substrate, and at least one film bridge. Two ground lines of the ground lines are on two sides of the signal line and are respectively spaced apart from the signal line. Each film bridge includes a plurality of connection walls and a bridge floor structure that is opposite to the substrate. The connection walls are respectively on the two ground lines. The bridge floor structure includes a phase shifting electrode and at least one pair of adsorption electrodes respectively connected to two sides of the phase shifting electrode. The phase shifting electrode is opposite to the signal line. Two adsorption electrodes in each pair are respectively opposite to the two ground lines, and are respectively connected to the connection walls on the two ground lines.

Abstract: An antenna includes: a dielectric layer having first and second surfaces opposite to each other; a radiating layer on the first surface, and having therein a slit; a first shielding layer on the second surface, and being electrically connected to the radiating layer; a first insulating layer on an upper side of the radiating layer; and a switch unit on an upper side of the first insulating layer, and corresponding to the slit. Each switch unit includes: a first electrode, a second insulating layer, a connecting portion, and a second electrode on the first insulating layer sequentially. Orthogonal projections of the first and second electrodes on the dielectric layer overlap each other. The connecting portion is connected to the second electrode to form a gap between the first and second electrodes. Orthogonal projections of the second electrode and a corresponding slit on the dielectric layer overlap each other.

Abstract: The present disclosure provides a phase shifter and an antenna. The phase shifter includes: a substrate; a signal electrode, and a first reference electrode and a second reference electrode respectively on two sides of an extending direction of the signal electrode; an interlayer insulating layer on the signal electrode, the first reference electrode and the second reference electrode; and at least one phase control unit each including a film bridge. At least part of the at least one phase control unit further includes at least one driving structure including at least a driving electrode; at least part of the at least one driving structure has a different height from a height of the signal electrode in a direction away from the substrate; the driving structure in each phase control unit is at least partially overlapped an orthographic projection of the film bridge on the substrate.

Abstract: An antenna includes: a substrate; a first reference electrode on a first surface of the substrate; a radiating element on a second surface of the substrate, feeding directions of a first port and a second port of the radiating element are different; and at least one transmission structure on the second surface of the substrate and connected to at least one of the first port and the second port. The transmission structure includes: a signal electrode, a second reference electrode on at least one side of the signal electrode, and at least one membrane bridge; the signal electrode feeds a microwave signal into the radiating element, is positioned in a space surrounded by the membrane bridge and the substrate, and is insulated from the membrane bridge through an interlayer dielectric layer; orthographic projections of the membrane bridge and the second reference electrode on the substrate are overlapped.

Abstract: A phase shifter and a method for manufacturing the same are provided. The phase shifter includes a substrate, a signal line on the substrate, ground lines in pairs and on the substrate, and at least one film bridge on the substrate and spaced apart from the signal line. Two adjacent ground lines of the ground lines are on both sides of the signal line and spaced apart from the signal line, respectively, and both ends of each film bridge are on the two adjacent ground lines, respectively. The signal line is in a space surrounded by each film bridge and the substrate. Each film bridge includes a metal layer opposite to the signal line, the metal layer has a plurality of openings therein, and the plurality of openings penetrate through the metal layer in a thickness direction of the metal layer.

Abstract: The disclosure provides a phase shifter, a manufacturing method thereof and an antenna, and belongs to the field of communication technology. The phase shifter includes a first substrate; a signal line and reference lines on the first substrate; a first insulating layer on the signal line; a plurality of electrode film bridges on a side of the first insulating layer distal to the signal line; and a first transmission structure on the first insulating layer and electrically connected to the signal line; and an orthographic projection of the first transmission structure on the first substrate is not overlapped with an orthographic projection of the plurality of electrode film bridges on the first substrate.

Abstract: A phased array antenna system is provided, including a feed structure and at least one phased array antenna element, wherein the at least one phased array antenna element includes a first impedance transformation unit, an MEMS phase-shifting multi-unit and an antenna. The first impedance transformation unit is connected to a feed structure, and the MEMS phase-shifting multi-unit is connected between the first impedance transformation unit and the antenna.

Abstract: A MEMS phase shifter, including: a substrate; a coplanar waveguide signal structure on the substrate; two coplanar waveguide ground wires respectively at two sides of the coplanar waveguide signal structure; insulating isolation layers respectively on the two coplanar waveguide ground wires; and a metal film bridge across and over the coplanar waveguide signal structure and forming a gap with the coplanar waveguide signal structure, both ends of the metal film bridge respectively attached to the insulating isolation layers on the two coplanar waveguide ground wires, wherein an insulating dielectric layer is provided on the coplanar waveguide signal structure, and the insulating dielectric layer comprises at least one concave part, which is concave in the direction towards the substrate, on the surface facing the metal film bridge.

Abstract: The present disclosure provides an antenna and a communication device, the antenna includes a dielectric substrate, a first radiating element, a second radiating element and a switching element, the second radiating element surrounds the first radiating element, the second radiating element is of an open-loop structure, at least one first groove is provided in the first radiating element, each switching element corresponds to one first groove, the switching element includes a membrane bridge and a signal electrode, the signal electrode is arranged on the dielectric substrate, coupled to the second radiating element, and insulated from the first radiating element, the membrane bridge is arranged on a side of the first radiating element away from the dielectric substrate, each membrane bridge crosses over one first groove, and at least part of the signal electrode is located in a space defined by the membrane bridge and the first groove.

Abstract: A phase shifter includes a substrate, a transmission line on the substrate and extending in a first direction, and first and second reference electrodes respectively on both sides of an extension direction of the transmission line. The transmission line includes signal line segments, any adjacent two of which have a gap therebetween to define a connection region. The phase shifter further includes at least one phase shifting unit each including: a film bridge extending in the first direction, a connection electrode extending in a second direction, and an interlayer insulating layer on a side of the connection electrode distal to the substrate. Both ends of the connection electrode are respectively connected with the first and second reference electrodes, and an orthogonal projection of the connection electrode on the substrate is in the connection region. Both ends of the film bridge are respectively connected with adjacent two signal line segments.

Abstract: A phase shifter includes: a first substrate; a signal electrode and a reference electrode on at least one side of an extension direction of the signal electrode; a first insulating layer covering the reference and signal electrodes; and at least one phase controlling unit above the first insulating layer. Each phase controlling unit includes a main body portion and at least one connection portion. Orthogonal projections of the main body portion and the signal electrode on the first substrate at least partially overlap each other. The main body portion and the first insulating layer have a gap therebetween, and the connection portion is connected between the main body portion and a portion of the first insulating layer covering the reference electrode. The main body portion includes first sub-electrodes short-circuited with each other, and at least some of the first sub-electrodes are connected to a same connection portion.

Abstract: There is provided a phase shifter including a substrate, a signal line on the substrate, ground lines disposed in pairs on the substrate, and at least one film bridge. Two ground lines of the ground lines are on two sides of the signal line and are respectively spaced apart from the signal line. Each film bridge includes a plurality of connection walls and a bridge floor structure that is opposite to the substrate. The connection walls are respectively on the two ground lines. The bridge floor structure includes a phase shifting electrode and at least one pair of adsorption electrodes respectively connected to two sides of the phase shifting electrode. The phase shifting electrode is opposite to the signal line. Two adsorption electrodes in each pair are respectively opposite to the two ground lines, and are respectively connected to the connection walls on the two ground lines.