Patents by Inventor Chyi-Shyung Chern

Chyi-Shyung Chern has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning device
    Publication number: 20070251035
    Abstract: A cleaning device. The cleaning device, for cleaning a brush of a wafer scrubber, includes a cup and a dummy pad. The dummy pad is disposed in the cup. The brush rubs against the dummy pad. A method of cleaning a brush of a wafer scrubber, comprising providing a cup with a dummy pad disposed in the cup, and rubbing the brush against the dummy pad.
    Type: Application
    Filed: May 1, 2006
    Publication date: November 1, 2007
    Inventors: Wen-Chang Peng, Ming-Da Guo, Chyi-Shyung Chern, Chang-Jung Wu