Patents by Inventor Ciaran J. McMullan

Ciaran J. McMullan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control of solid state dimensional features
    Patent number: 6783643
    Abstract: A solid state structure having a surface is provided and exposed to a flux, F, of incident ions under conditions that are selected based on: ∂ ∂ t ⁢ C ⁡ ( r , t ) = F ⁢   ⁢ Y 1 + D ⁢ ∇ 2 ⁢ C - C τ trap - F ⁢   ⁢ C ⁢   ⁢ &sigm
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: August 31, 2004
    Assignee: President and Fellows of Harvard College
    Inventors: Jene A. Golovchenko, Daniel Branton, Michael J. Aziz, Jiali Li, Derek M. Stein, Ciaran J. McMullan
  • Control of solid state dimensional features
    Publication number: 20030066749
    Abstract: A solid state structure having a surface is provided and is exposed to a flux, F, of incident ions.
    Type: Application
    Filed: June 27, 2002
    Publication date: April 10, 2003
    Applicant: President and Fellows of Harvard College
    Inventors: Jene A. Golovchenko, Daniel Branton, Michael J. Aziz, Jiali Li, Derek M. Stein, Ciaran J. McMullan
  • Control of solid state dimensional features
    Patent number: 6464842
    Abstract: There is provided controlled fabrication of a solid state structural feature on a solid state structure by exposing the structure to a fabrication process environment the conditions of which are selected to produce a prespecified feature in the structure. A physical detection species is directed toward a designated structure location during process environment exposure of the structure, and the detection species is detected in a trajectory from traversal of the designated structure location, to indicate changing physical dimensions of the prespecified feature. The fabrication process environment is then controlled in response to the physical species detection to fabricate the structural feature.
    Type: Grant
    Filed: June 22, 2000
    Date of Patent: October 15, 2002
    Assignee: President and Fellows of Harvard College
    Inventors: Jene A. Golovchenko, Daniel Branton, Derek M. Stein, Ciaran J. McMullan, Jiali Li