Abstract: A system comprises a spatial light modulator comprising a plurality of modulation elements, the spatial light modulator operable to receive an optical signal comprising one or more optical channels, wherein the elements are operable to perform an optical function on at least one of the one or more optical channels. The system further comprises two or more reset groups associated with the spatial light modulator, wherein each reset group comprises one or more elements, and wherein at least one of the one or more optical channels resides on at least two of the two or more reset groups. The system also comprises a controller operable to actuate the elements of at least one of the at least two reset groups associated with the optical channel at a different time than any one or more other reset group of the at least two reset groups.

Abstract: A system comprises a spatial light modulator comprising a plurality of modulation elements, the spatial light modulator operable to receive an optical signal comprising one or more optical channels, wherein the elements are operable to perform an optical function on at least one of the one or more optical channels. The system further comprises two or more reset groups associated with the spatial light modulator, wherein each reset group comprises one or more elements, and wherein at least one of the one or more optical channels resides on at least two of the two or more reset groups. The system also comprises a controller operable to actuate the elements of at least one of the at least two reset groups associated with the optical channel at a different time than any one or more other reset group of the at least two reset groups.

Abstract: A method and system for measuring the temporal response of a micromirror array to a variety of driving signals. A micromirror array is illuminated with a coherent light source so that a diffraction pattern is reflected from the micromirror array. One or more photodetectors are aligned with spots of light in the diffraction pattern that correspond to orders of the diffraction pattern. Diffraction pattern theory predicts that the intensity of these spots of light will vary as the tilt angle of the micromirrors is changed. Thus, by measuring the relative intensity of the spots of light as the micromirror array is provided with a variety of driving signals, many performance characteristics of the micromirror array can be measured. Some of these characteristics include the impulse response, the forced resonant frequency (i.e. the natural frequency), the damped resonant frequency, the quality factor of the micromirror response, the damping factor of the micromirror response, and the frequency transfer function.

Abstract: A method and system for measuring the temporal response of a micromirror array to a variety of driving signals. A micromirror array is illuminated with a coherent light source so that a diffraction pattern is reflected from the micromirror array. One or more photodetectors are aligned with spots of light in the diffraction pattern that correspond to orders of the diffraction pattern. Diffraction pattern theory predicts that the intensity of these spots of light will vary as the tilt angle of the micromirrors is changed. Thus, by measuring the relative intensity of the spots of light as the micromirror array is provided with a variety of driving signals, many performance characteristics of the micromirror array can be measured. Some of these characteristics include the impulse response, the forced resonant frequency (i.e. the natural frequency), the damped resonant frequency, the quality factor of the micromirror response, the damping factor of the micromirror response, and the frequency transfer function.

Abstract: A method for testing the image displacement of a reticle following a change in illumination comprising the steps of taking a first image displacement measurement with a test reticle (110) having a variable linewidth (L) and a variable pitch size (s) on an image displacement mark (30, 40, 50, 60, 70, 80, 90, 100), changing the illumination conditions of the photolithographic equipment and taking a second image displacement measurement with the test reticle (110) to determine an image displacement offset due to changes in illumination, is disclosed.

Abstract: A method for testing the image displacement of a reticle following a change in illumination comprising the steps of taking a first image displacement measurement with a test reticle (110) having a variable linewidth (L) and a variable pitch size (s) on an image displacement mark (30, 40, 50, 60, 70, 80, 90, 100), changing the illumination conditions of the photolithographic equipment and taking a second image displacement measurement with the test reticle (110) to determine an image displacement offset due to changes in illumination, is disclosed.