Abstract: The object of the present invention is a mount for a rotating target, roughly disk-shaped and perforated at its center. The mount is made of a material which a structurally hardened nickel-based superalloy. The mount is disk-shaped with a narrower area at its periphery, and the narrow peripheral area and the thick area surrounding the central orifice are separated by a discontinuous area whose slope is between 3° and 10°, with the thickness ratio between the narrow peripheral area and the thick area surrounding the central orifice being between 1.5 and 3. The superalloy is an Inconel that has undergone a structural hardening treatment after machining. At least one of the mount's surfaces is coated with an emissive coating used to discharge heat through thermal radiation.

Abstract: The present invention provides a drain device for a transporting box with an input/output opening which can be blocked by a box door and which contains substrate wafers stacked according to parallel planes. The drain device comprises a volume limited by a sealed wall divided into at least an upper part with a purging gas inlet orifice and a lower part with a purging gas outlet orifice, with the two parts being separated by a sealed partition, and a range of guides defining the openings arranged parallel to those of the wafers and connecting with the volume of the drain device to direct the purging gas towards the transporting box.