Abstract: The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.

Abstract: An electrostatic actuator including: at least one fixed electrode, fixed with respect to a substrate; at least one flexible electrode arranged to face the substrate; a pivot member extending from the flexible electrode, the pivot member being fixed to a face of the flexible electrode facing the fixed electrode, and the pivot member being made from a conducting material; and at least one suspending unit suspending the flexible electrode and holding the flexible electrode at rest at a distance from the substrate, wherein the suspending unit and the pivot member are different.

Abstract: Micro-mirror or micro-lens made up of a moving part (10) with a reflective or refringent zone (17), a fixed part (14), means of connection (13) of the moving part (10) to the fixed part (14) which forms an axis of rotation (12) for the moving part (10) and of means for controlling (18) the rotation. The means of control include two or more actuators (19) arranged either side of the axis (12), each formed of a fixed electrode (20) forming part of the fixed part (14) and a moving electrode (21) possessing a free end (21.1) and an end connected to a drive arm (23) which is substantially parallel to the axis (12) and emerging from the moving part (10). The moving electrode (21) adheres to the fixed electrode (20) from its free end (21.1) when a voltage is applied to the actuator (19), the adhesion is a function of the applied voltage. Application to optical systems.

Abstract: The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.

Abstract: An electrostatic actuation device including one mobile electrode, including at least one mobile part with respect to a substrate, at least two electrodes fixed with respect of the substrate, located on a same side of the mobile electrode and each facing a part of the mobile electrode, and at least one pivot with at least of portion of the mobile electrode.

Abstract: An electrostatic actuation device, including a flexible electrode, having a first and a second end, at least part of the flexible electrode being mobile relative to a substrate, two electrodes fixed relative to the substrate, and a mechanism for forming two pivots of the flexible electrode, located between the two ends of the flexible electrode.

Abstract: The inventive micro-mirror or micro-lens comprises a movable part (10) provided with a reflective or refringent area (17), a fixed part (14), elements (13) connecting the movable part (10) to the fixed part (14) and forming the axis of rotation (12) of the movable part (10) and rotation control elements (18). Said control elements comprise two or more actuators (19) which are disposed on both sides of the axis (12) and are formed by a fixed electrode (20) connected to the fixed part (14) and a movable electrode (21)provided with the free end (21.1) and the end thereof connected to a driving arm (23) which is arranged in a direction substentially parallel to the axis (12) and extended away from the movable part (10). The movable electrode (21) is applied to the fixed electrode (20) by the free end thereof (21.1) when a voltage is supplied to the actuator (19), the application pressure depends on the applied voltage. Said invention can be used for optical systems.

Abstract: This invention mainly relates to: an electrostatic actuator, at least one fixed electrode (2) with respect to a substrate (4), at least one flexible electrode (6) arranged facing the substrate, at least one means forming the pivot of the flexible electrode, the said means being fixed to the flexible electrode on its face facing the fixed electrode (2) and made from a conducting material, at least one means of suspension (11) of the flexible electrode, holding the said flexible electrode at rest at a distance from the substrate (4). Another purpose of this invention is a method for making such an actuator.

Abstract: An actuator is described having two fixed magnetic structures, and a mobile magnetic part able to move towards either one of the two ends of the magnetic structures. The actuator can be in the form of a microactuator, and can be used in the fabrication of microrelays, microvalves, and micropumps.

Abstract: According to the invention, in order to confine a liquid in at least one area of a substrate, a treatment is applied to the surface of the substrate, creating, on this surface, at least one area (54), the wettability of which is larger than that of the surroundings of the area, the substrate is immersed in the liquid, and then it is removed from the latter. Further, after applying the treatment to the surface, a cavity (40) intended to contain the liquid and including a single aperture (41) is formed in the area. The invention is particularly applicable to the filling of cavities of an optical micro-actuator.

Abstract: Magnetic actuator having a closed magnetic circuit (26) capable of guiding a magnetic flux. The magnetic circuit (26) comprises a fixed magnetic part (30, 31, 32) with a yoke (30) and a mobile part (22), magnetically connected to each other and also at least one main air gap (29) delimited by at least one portion (28) of the mobile part (22) and by the yoke (30). In the main air gap (29), the flux is closed by being set up approximately transverse to the mobile part (22). The fixed part (30, 31, 32) also comprises flux recuperation means (40) that contribute with the mobile part (22) to delimiting an auxiliary air gap (38) in which the magnetic flux is set up laterally to the mobile part (22). The flux is contained on each side of the main air gap (29), on one side by the yoke (30), and on the other side jointly by the mobile part (22) and the flux recuperation means (40) through the part (28) contributing to delimiting the main air gap (29).

Abstract: Magnetic actuator having a closed magnetic circuit (26) capable of guiding a magnetic flux. The magnetic circuit (26) comprises a fixed magnetic part (30, 31, 32) with a yoke (30) and a mobile part (22), magnetically connected to each other and also at least one main air gap (29) delimited by at least one portion (28) of the mobile part (22) and by the yoke (30). In the main air gap (29), the flux is closed by being set up approximately transverse to the mobile part (22). The fixed part (30, 31, 32) also comprises flux recuperation means (40) that contribute with the mobile part (22) to delimiting an auxiliary air gap (38) in which the magnetic flux is set up laterally to the mobile part (22). The flux is contained on each side of the main air gap (29), on one side by the yoke (30), and on the other side jointly by the mobile part (22) and the flux recuperation means (40) through the part (28) contributing to delimiting the main air gap (29).

Abstract: The present invention relates to an optical micro-actuator comprising a cavity (30) formed between at least one optical input channel (12, 12a, 12b) and at least one optical output channel (14, 14a, 14b), the cavity being capable of containing at least one first optical fluid and one second optical fluid (32, 33, 34, 35), with different optical properties, and means of modifying the position of an interface between the first and second optical fluids with respect to the optical channels. According to the invention, the means of modifying the position of the interface comprise at least one chamber containing at least one fluid in fluid contact with the cavity, and means of modifying the volume of the chamber.