Patents by Inventor Claudia Woersching

Claudia Woersching has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the tracking and identification of components of lithography systems, and lithography system
    Patent number: 11927888
    Abstract: A method for the tracking and identification of components of lithography systems, for example of projection exposure apparatuses for semiconductor lithography is provided. The components are each provided with at least one transponder. The transponder has a data memory, on which data relating to the respective component are stored. The transponder is configured to pick up wirelessly arriving signals of a reader and to respond with data from the data memory. The data are stored on the data memory during the production of the component and/or during the production of the lithography system and/or after the start-up of the lithography system.
    Type: Grant
    Filed: July 12, 2022
    Date of Patent: March 12, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Kamp-Froese, Claudia Woersching
  • METHOD FOR THE TRACKING AND IDENTIFICATION OF COMPONENTS OF LITHOGRAPHY SYSTEMS, AND LITHOGRAPHY SYSTEM
    Publication number: 20220342320
    Abstract: A method for the tracking and identification of components of lithography systems, for example of projection exposure apparatuses for semiconductor lithography is provided. The components are each provided with at least one transponder. The transponder has a data memory, on which data relating to the respective component are stored. The transponder is configured to pick up wirelessly arriving signals of a reader and to respond with data from the data memory. The data are stored on the data memory during the production of the component and/or during the production of the lithography system and/or after the start-up of the lithography system.
    Type: Application
    Filed: July 12, 2022
    Publication date: October 27, 2022
    Inventors: Michael Kamp-Froese, Claudia Woersching