Patents by Inventor Claudio Miskys

Claudio Miskys has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10604847
    Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
    Type: Grant
    Filed: December 7, 2018
    Date of Patent: March 31, 2020
    Assignee: ASM IP Holding B.V.
    Inventors: Mark Hawkins, Bradley Leonard Halleck, Tom Kirschenheiter, Benjamin Hossa, Clay Pottebaum, Claudio Miskys
  • Publication number: 20190106788
    Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
    Type: Application
    Filed: December 7, 2018
    Publication date: April 11, 2019
    Inventors: Mark Hawkins, Bradley Leonard Halleck, Tom Kirschenheiter, Benjamin Hossa, Clay Pottebaum, Claudio Miskys
  • Patent number: 10167557
    Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
    Type: Grant
    Filed: March 18, 2014
    Date of Patent: January 1, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Mark Hawkins, Bradley Leonard Halleck, Tom Kirschenheiter, Benjamin Hossa, Clay Pottebaum, Claudio Miskys
  • Publication number: 20150267299
    Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
    Type: Application
    Filed: March 18, 2014
    Publication date: September 24, 2015
    Applicant: ASM IP Holding B.V.
    Inventors: Mark Hawkins, Bradley Leonard Halleck, Tom Kirschenheiter, Benjamin Hossa, Clay Pottebaum, Claudio Miskys