Abstract: According to various embodiments, a cavitation sensor for detecting bubbles in a liquid is provided. The cavitation sensor may include: a substrate having an insulative surface; and an electrode arrangement provided on or within the insulative surface of the substrate. The electrode arrangement may include a first electrode and a second electrode being isolated from each other by the insulative surface, each of the first and the second electrode including a sensing portion. The spacing between the sensing portion of the first electrode and the sensing portion of the second electrode is adapted to allow charge flow between the first electrode and the second electrode caused by cavitation occurring at the sensing portion.