Abstract: An apparatus for use with a digital micro-mirror 100 includes a hinge 116 disposed outwardly from a substrate 102. The hinge 116 is capable of at least partially supporting a micro-mirror 104 disposed outwardly from the hinge 116. The micro-mirror 104 is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge 116 comprises a substantially flat profile for at least a portion of the hinge 116 disposed between a first hinge post 108 of the hinge 116 and a mid-point of the hinge 116. The apparatus also includes a plurality of process control voids formed within a conductive layer 120 disposed inwardly from the hinge 116. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.

Abstract: An apparatus for use with a digital micro-mirror includes a hinge disposed outwardly from a substrate. The hinge is capable of at least partially supporting a micro-mirror disposed outwardly from the hinge. The micro-mirror is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge comprises a substantially flat profile for at least a portion of the hinge disposed between a first hinge post of the hinge and a mid-point of the hinge. The apparatus also includes a plurality of process control voids formed within a conductive layer disposed inwardly from the hinge. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.