Patents by Inventor Clemens Fritz

Clemens Fritz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060270143
    Abstract: A method for manufacturing contact structures for DRAM semiconductor memories is disclosed. In one embodiment, contact openings are formed in a support area after execution of high-temperature processes for activating doping agents and repairing crystal defects. A low contact resistance between a conductive contact opening filling and an adjacent semiconductor substrate is achieved by forming a cobalt silicide or nickel silicide.
    Type: Application
    Filed: May 18, 2006
    Publication date: November 30, 2006
    Inventors: Matthias Goldbach, Clemens Fritz, Audrey Dupont