Patents by Inventor Clemens KÜHNE

Clemens KÜHNE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11788630
    Abstract: A vacuum valve including a housing, a closure unit with two valve plates, supported by a valve rod, and a carrier piece connected rigidly to the valve rod, a transmission unit, a drive unit with a base body and an actuator, a longitudinal linear guide, by which the transmission unit is guided parallel to a longitudinal adjusting direction relative to the base body, an oblique linear guide, by which the carrier piece is guided parallel to an oblique adjusting direction relative to the transmission unit, a spring acting between the transmission unit and the carrier piece, a stop device which blocks adjustment of the closure unit in the longitudinal adjusting direction in a middle position thereof, and a blocking unit, which in the locked state blocks an adjustment of the closure unit situated in the middle position counter to the longitudinal adjusting direction and, in the release state, allows adjustment.
    Type: Grant
    Filed: June 6, 2022
    Date of Patent: October 17, 2023
    Assignee: VAT Holding AG
    Inventors: Lukas Schaltegger, Clemens Kühne
  • Patent number: 11784086
    Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. The pin lifting device includes a coupling, a supporting pin configured to support the substrate, and a drive unit which configure to drive the coupling. The pin lifting device includes a separating means for separating a process atmosphere area from an external atmosphere area. The drive unit is at least partially in the external atmosphere area and the coupling is in the process atmosphere area. The coupling includes a linearly extending recess defining a central receiving axis. The recess has a width substantially orthogonally to the receiving axis. A clamping section delimited axially with respect to the receiving axis has a clamping element, in an unloaded receiving state, defines a clamping width that is smaller than the recess width, and the clamping width is variable as a function of a force acting radially on the clamping element.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: October 10, 2023
    Assignee: VAT HOLDING AG
    Inventors: Daniel Dünser, Clemens Kühne, Michael Dür, Rene Bereuter
  • Publication number: 20220390020
    Abstract: A vacuum valve including a housing, a closure unit with two valve plates, supported by a valve rod, and a carrier piece connected rigidly to the valve rod, a transmission unit, a drive unit with a base body and an actuator, a longitudinal linear guide, by which the transmission unit is guided parallel to a longitudinal adjusting direction relative to the base body, an oblique linear guide, by which the carrier piece is guided parallel to an oblique adjusting direction relative to the transmission unit, a spring acting between the transmission unit and the carrier piece, a stop device which blocks adjustment of the closure unit in the longitudinal adjusting direction in a middle position thereof, and a blocking unit, which in the locked state blocks an adjustment of the closure unit situated in the middle position counter to the longitudinal adjusting direction and, in the release state, allows adjustment.
    Type: Application
    Filed: June 6, 2022
    Publication date: December 8, 2022
    Applicant: VAT Holding AG
    Inventors: Lukas SCHALTEGGER, Clemens KÜHNE
  • Publication number: 20210134651
    Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. The pin lifting device includes a coupling, a supporting pin configured to support the substrate, and a drive unit which configure to drive the coupling. The pin lifting device includes a separating means for separating a process atmosphere area from an external atmosphere area. The drive unit is at least partially in the external atmosphere area and the coupling is in the process atmosphere area. The coupling includes a linearly extending recess defining a central receiving axis. The recess has a width substantially orthogonally to the receiving axis. A clamping section delimited axially with respect to the receiving axis has a clamping element, in an unloaded receiving state, defines a clamping width that is smaller than the recess width, and the clamping width is variable as a function of a force acting radially on the clamping element.
    Type: Application
    Filed: March 27, 2018
    Publication date: May 6, 2021
    Applicant: VAT Holding AG
    Inventors: Daniel DÜNSER, Clemens KÜHNE, Michael DÜR, Rene BEREUTER