Patents by Inventor Clement Merckling

Clement Merckling has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11442297
    Abstract: A structure is provided and includes (i) a substrate having a surface, the surface comprising a ternary or quaternary oxide having a first lattice parameter, the first lattice parameter being a lattice parameter of the ternary or quaternary oxide as it is present at the surface; and (ii) a layer of a perovskite oxide on the ternary or quaternary oxide, the perovskite oxide having a second lattice parameter, the second lattice parameter being a native lattice parameter of the perovskite oxide, wherein the first lattice parameter is larger than the second lattice parameter. A method for forming a perovskite oxide with an a-axis orientation is also provided.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: September 13, 2022
    Assignee: IMEC VZW
    Inventor: Clement Merckling
  • Patent number: 10930750
    Abstract: The disclosed technology is directed to a method of forming a qubit device.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: February 23, 2021
    Assignee: IMEC vzw
    Inventors: Clement Merckling, Nadine Collaert
  • Patent number: 10872824
    Abstract: A device and method for manufacturing a Si-based high-mobility CMOS device is provided.
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: December 22, 2020
    Assignee: IMEC VZW
    Inventors: Clement Merckling, Guillaume Boccardi
  • Patent number: 10763643
    Abstract: An electrically-operated semiconductor laser device and method for forming the laser device are provided. The laser device includes a fin structure to which a waveguide is optically coupled. The waveguide is optically coupled to passive waveguides at either end thereof. The fin structure includes an array of fin elements, each fin element comprising Group III-V materials.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: September 1, 2020
    Assignees: IMEC VZW, Katholieke Universiteit Leuven, KU LEUVEN R& D, Universiteit Gent
    Inventors: Joris Van Campenhout, Clement Merckling, Maria Ioanna Pantouvaki, Ashwyn Srinivasan, Irina Kulkova
  • Publication number: 20200201085
    Abstract: A structure is provided and includes (i) a substrate having a surface, the surface comprising a ternary or quaternary oxide having a first lattice parameter, the first lattice parameter being a lattice parameter of the ternary or quaternary oxide as it is present at the surface; and (ii) a layer of a perovskite oxide on the ternary or quaternary oxide, the perovskite oxide having a second lattice parameter, the second lattice parameter being a native lattice parameter of the perovskite oxide, wherein the first lattice parameter is larger than the second lattice parameter. A method for forming a perovskite oxide with an a-axis orientation is also provided.
    Type: Application
    Filed: December 12, 2019
    Publication date: June 25, 2020
    Inventor: Clement Merckling
  • Publication number: 20200119174
    Abstract: A method for forming a Transition Metal Dichalcogenide (TMD)—Group III-V semiconductor heterostructure comprises forming an insulating layer on an upper surface of a substrate, wherein the upper surface of the substrate is formed by a (111)-surface of a group IV semiconductor, forming a first aperture in the insulating layer, the aperture exposing a portion of the upper surface of the substrate, forming in a first epitaxial growth process, a semiconductor structure formed by a group III-V semiconductor comprising a pillar extending through the first aperture and a micro disc extending horizontally along a first portion of the upper surface of the insulating layer, and forming in a second epitaxial growth process, a TMD layer on an upper surface of the micro disc.
    Type: Application
    Filed: October 9, 2019
    Publication date: April 16, 2020
    Inventors: Clement Merckling, Salim El Kazzi
  • Patent number: 10354868
    Abstract: A method for formation of a transition metal dichalcogenide (TMDC) material layer on a substrate arranged in a process chamber of a molecular beam epitaxy tool is provided. The method includes evaporating metal from a solid metal source, forming a chalcogen-including gas-plasma, and introducing the evaporated metal and the chalcogen-including gas-plasma into the process chamber thereby forming a TMDC material layer on the substrate.
    Type: Grant
    Filed: November 21, 2017
    Date of Patent: July 16, 2019
    Assignee: IMEC VZW
    Inventors: Salim El Kazzi, Clement Merckling
  • Publication number: 20190214474
    Abstract: The disclosed technology is directed to a method of forming a qubit device.
    Type: Application
    Filed: December 17, 2018
    Publication date: July 11, 2019
    Inventors: Clement Merckling, Nadine Collaert
  • Publication number: 20190181050
    Abstract: A device and method for manufacturing a Si-based high-mobility CMOS device is provided.
    Type: Application
    Filed: February 20, 2019
    Publication date: June 13, 2019
    Inventors: Clement Merckling, Guillaume Boccardi
  • Patent number: 10256157
    Abstract: A device and method for manufacturing a Si-based high-mobility CMOS device is provided.
    Type: Grant
    Filed: November 29, 2017
    Date of Patent: April 9, 2019
    Assignee: IMEC VZW
    Inventors: Clement Merckling, Guillaume Boccardi
  • Patent number: 10128371
    Abstract: A method for forming a semiconductor device is disclosed. The method includes providing a semiconductor substrate. The method also includes epitaxially growing on the semiconductor substrate a first part of a III-V semiconductor nanostructure. The method further includes covering the first part of the III-V semiconductor nanostructure with a layer of a first material. Additionally, the method includes removing a top portion of the layer of the first material. Still further, the method includes epitaxially growing on the first part of the III-V semiconductor nanostructure a second part of the III-V semiconductor nanostructure. The method additionally includes covering the second part of the III-V semiconductor nanostructure with a layer of a second material. The second material is different from the first material. Even further, the method includes removing a top portion of the layer of the second material.
    Type: Grant
    Filed: October 13, 2016
    Date of Patent: November 13, 2018
    Assignee: IMEC VZW
    Inventors: Boon Teik Chan, Clement Merckling, Zheng Tao
  • Publication number: 20180183212
    Abstract: An electrically-operated semiconductor laser device and method for forming the laser device are provided. The laser device includes a fin structure to which a waveguide is optically coupled. The waveguide is optically coupled to passive waveguides at either end thereof. The fin structure includes an array of fin elements, each fin element comprising Group III-V materials.
    Type: Application
    Filed: December 13, 2017
    Publication date: June 28, 2018
    Applicants: IMEC VZW, Katholieke Universiteit Leuven, KU LEUVEN R&D, Universiteit Gent
    Inventors: Joris Van Campenhout, Clement Merckling, Maria Ioanna Pantouvaki, Ashwyn Srinivasan, Irina Kulkova
  • Publication number: 20180144935
    Abstract: A method for formation of a transition metal dichalcogenide (TMDC) material layer on a substrate arranged in a process chamber of a molecular beam epitaxy tool is provided. The method includes evaporating metal from a solid metal source, forming a chalcogen-including gas-plasma, and introducing the evaporated metal and the chalcogen-including gas-plasma into the process chamber thereby forming a TMDC material layer on the substrate.
    Type: Application
    Filed: November 21, 2017
    Publication date: May 24, 2018
    Applicant: IMEC VZW
    Inventors: Salim El Kazzi, Clement Merckling
  • Patent number: 9947591
    Abstract: A device and method for manufacturing a Si-based high-mobility CMOS device is provided.
    Type: Grant
    Filed: November 16, 2016
    Date of Patent: April 17, 2018
    Assignee: IMEC VZW
    Inventors: Clement Merckling, Guillaume Boccardi
  • Publication number: 20180082907
    Abstract: A device and method for manufacturing a Si-based high-mobility CMOS device is provided.
    Type: Application
    Filed: November 29, 2017
    Publication date: March 22, 2018
    Applicant: IMEC VZW
    Inventors: Clement Merckling, Guillaume Boccardi
  • Publication number: 20170178971
    Abstract: A device and method for manufacturing a Si-based high-mobility CMOS device is provided.
    Type: Application
    Filed: November 16, 2016
    Publication date: June 22, 2017
    Applicant: IMEC VZW
    Inventors: Clement Merckling, Guillaume Boccardi
  • Publication number: 20170179281
    Abstract: A method for forming a semiconductor device is disclosed. The method includes providing a semiconductor substrate. The method also includes epitaxially growing on the semiconductor substrate a first part of a III-V semiconductor nanostructure. The method further includes covering the first part of the III-V semiconductor nanostructure with a layer of a first material. Additionally, the method includes removing a top portion of the layer of the first material. Still further, the method include epitaxially growing on the first part of the III-V semiconductor nanostructure a second part of the III-V semiconductor nanostructure. The method additionally includes covering the second part of the III-V semiconductor nanostructure with a layer of a second material. The second material is different from the first material. Even further, the method includes removing a top portion of the layer of the second material.
    Type: Application
    Filed: October 13, 2016
    Publication date: June 22, 2017
    Applicant: IMEC VZW
    Inventors: Boon Teik Chan, Clement Merckling, Zheng Tao
  • Publication number: 20170170313
    Abstract: A method of producing a pre-patterned structure comprising at least one cavity for growing a vertical nanostructure is disclosed. The method includes providing at least one protruding structure that extends upwardly from a main surface of a substrate. The at least one protruding structure has a main portion of a first height and an upper portion on the main portion. The method also includes embedding the at least one protruding structure in a dielectric material. Further, the method includes removing at least an excess portion of the dielectric material, thereby exposing a top surface of the upper portion and forming a flattened surface of the top surface of the upper portion and the dielectric material. In addition, the method includes forming at least one cavity of a first depth by removing the upper portion, thereby exposing a top surface of the main portion of the at least one protruding structure.
    Type: Application
    Filed: November 15, 2016
    Publication date: June 15, 2017
    Applicant: IMEC VZW
    Inventors: Boon Teik Chan, Clement Merckling, Katia Devriendt, Rita Rooyackers
  • Patent number: 9601488
    Abstract: The disclosed technology generally relates to semiconductor devices and more particularly to a gate-all-around semiconductor device, and methods of fabricating the same. In one aspect, the method comprises providing on a semiconductor substrate between STI regions at least one suspended nanostructure anchored by a source region and a drain region. The suspended nanostructure is formed of a crystalline semiconductor material that is different from a crystalline semiconductor material of the semiconductor substrate. A gate stack surrounds the at least one suspended nanostructure.
    Type: Grant
    Filed: April 25, 2016
    Date of Patent: March 21, 2017
    Assignee: IMEC VZW
    Inventors: Niamh Waldron, Clement Merckling, Nadine Collaert
  • Patent number: 9478611
    Abstract: An example semiconductor structure comprises a first surface and at least one nanowire, the at least one nanowire being perpendicular to the first surface, wherein the first surface is defect-poor and is made of a doped III-V semiconductor material, wherein the at least one nanowire is defect-poor and made of an undoped III-V semiconductor material having a lattice mismatch with the material of the first surface of from about 0% to 1%.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: October 25, 2016
    Assignee: IMEC VZW
    Inventors: Boon Teik Chan, Clement Merckling