Patents by Inventor Cletus Walter Wilkins

Cletus Walter Wilkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Titanium silicide process
    Patent number: 5686359
    Abstract: The specification describes a process for siliciding silicon metallization with titanium. The process requires two anneal steps and is based on careful control of operating parameters during the first anneal step. A prescription is given relating time and temperature of anneal, and titanium film thickness, to silicide resistivity. Proper choice of parameters also minimizes variables in the process.
    Type: Grant
    Filed: December 7, 1995
    Date of Patent: November 11, 1997
    Assignee: Lucent Technologies Inc.
    Inventors: Steven Glenn Meester, Arun Kumar Nanda, Cletus Walter Wilkins
  • Multilayered A1-alloy structure for metal conductors
    Patent number: 5641994
    Abstract: A Si IC includes an Al-based layer which is deposited as a composite of sublayers of different composition Al-based materials. In one embodiment a first sublayer comprises an Al-Si-based alloy disposed so as to prevent substantial Si migration into the first sublayer, and a second sublayer, above the first, comprises an Al-based alloy with substantially no Si to alleviate precipitation-induced problems.
    Type: Grant
    Filed: June 26, 1996
    Date of Patent: June 24, 1997
    Assignee: Lucent Technologies Inc.
    Inventors: Cheryl Anne Bollinger, Edward Alan Dein, Sailesh Mansinh Merchant, Arun Kumar Nanda, Pradip Kumar Roy, Cletus Walter Wilkins, Jr.