Patents by Inventor Clifford Russell Bugge

Clifford Russell Bugge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Diagonal compound mill
    Patent number: 11158487
    Abstract: Ion beams are directed to a substrate surface to expose a tapered, tilted surface in the substrate. The ion beams and the substrate are situated so that a first ion beam is incident along a first axis at a glancing angle, and a second ion beam is incident along a second axis in a plane defined by the glancing angle and at an angle with respect to the first axis. Exposure to the second ion beam tends to produced superior quality in the exposed surface such as by reducing curtain artifacts.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: October 26, 2021
    Assignee: FEI Company
    Inventors: Clifford Russell Bugge, Craig Henry, Michael B. Schmidt, Mark Najarian
  • DIAGONAL COMPOUND MILL
    Publication number: 20200312618
    Abstract: Ion beams are directed to a substrate surface to expose a tapered, tilted surface in the substrate. The ion beams and the substrate are situated so that a first ion beam is incident along a first axis at a glancing angle, and a second ion beam is incident along a second axis in a plane defined by the glancing angle and at an angle with respect to the first axis. Exposure to the second ion beam tends to produced superior quality in the exposed surface such as by reducing curtain artifacts.
    Type: Application
    Filed: March 29, 2019
    Publication date: October 1, 2020
    Applicant: FEI Company
    Inventors: Clifford Russell Bugge, Craig Henry, Michael B. Schmidt, Mark Najarian