Patents by Inventor Clive Meaton

Clive Meaton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring apparatus and method for improving the accuracy and repeatability of electrochemical capacitance voltage (ECV) measurements
    Patent number: 7713404
    Abstract: An apparatus and method for improving the accuracy of Electrochemical Capacitance Voltage (ECV) profiling measurements by alerting the operator to the presence of surface films or gas bubbles during the etching process and by using this in-situ monitoring apparatus to determine the true measurement area at the end of the measurement cycle and using the new value to recalculate the data. By making the area measurement integral to the ECV tool, every sample measurement can be corrected for the true measurement area, leading to improved accuracy and eliminating a large source of error.
    Type: Grant
    Filed: July 4, 2003
    Date of Patent: May 11, 2010
    Assignee: Nanometrics Incorporated
    Inventors: Ian Mayes, Michael Sweeney, Harvey Podgorney, Clive Meaton
  • Monitoring apparatus and method for improving the accuracy and repeatability of electrochemical capacitance voltage (ecv) measurements
    Publication number: 20060207887
    Abstract: An apparatus and method for improving the accuracy of Electrochemical Capacitance Voltage (ECV) profiling measurements by alerting the operator to the presence of surface films or gas bubbles during the etching process and by using this in-situ monitoring apparatus to determine the true measurement area at the end of the measurement cycle and using the new value to recalculate the data. By making the area measurement integral to the ECV tool, every sample measurement can be corrected for the true measurement area, leading to improved accuracy and eliminating a large source of error.
    Type: Application
    Filed: July 4, 2003
    Publication date: September 21, 2006
    Inventors: Ian Mayes, Michael Sweeney, Harvey Podgorney, Clive Meaton