Patents by Inventor Cohen Yoel

Cohen Yoel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for measuring in patterned structures
    Patent number: 8142965
    Abstract: A sample having a patterned area and a method for use in controlling a pattern parameter is presented. The sample comprises at least one test structure having a patterned region similar to a pattern in the patterned area, the patterns in the patterned area and in the at least test structure being produced by the same patterning process. The at least one test structure comprises at least one pattern parameter of a predetermined value intentionally increased above a natural value of said certain parameter induced by a patterning process. By this, the natural value of the parameter induced by the patterning process can be determined.
    Type: Grant
    Filed: February 7, 2008
    Date of Patent: March 27, 2012
    Assignee: Nova Measuring Instruments Ltd.
    Inventor: Cohen Yoel