Abstract: In making electronic component packages, a method includes forming a sacrificial material over a first temporary substrate, applying a second temporary substrate to the sacrificial material, and then curing the sacrificial material. After curing, the second temporary substrate is removed. The top surface of the sacrificial layer is defined by the second temporary substrate. After removal, a redistribution structure is formed on the top surface. After the formation of the redistribution structure, electronic components are applied to the redistribution structure. The electronic components are encapsulated to form an encapsulated panel. The first temporary substrate and the sacrificial material are removed. The panel is singulated into multiple electronic component packages.

Abstract: A semiconductor apparatus including a wafer base with a top side and a bottom side, a silver base with a top side and a bottom side, wherein the bottom side of the silver base is attached to the top side of the wafer base and wherein the silver base provides a reflective surface, and an aluminum nitride protective layer attached to the top side of the silver base, wherein the aluminum nitride protective layer shields the silver base from the environment.