Patents by Inventor Colin L. Carr

Colin L. Carr has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for recycling/reclaiming a monitor wafer
    Patent number: 7955956
    Abstract: The invention provides a method for recycling/reclaiming a monitor or test wafer and a method for testing an integrated circuit manufacturing process. After a monitor wafer has been used for testing one or more semiconductor wafer processing steps to determine adequacy for use with production wafers, deposited materials and other residues from the tested processing steps are removed, and the stripped wafer is subjected to a thermal anneal to repair defects in its surface and return it to a reusable condition.
    Type: Grant
    Filed: November 18, 2009
    Date of Patent: June 7, 2011
    Assignee: Texas Instruments Incorporated
    Inventors: Gary C. Barrett, Bradley D. Bucher, Colin L. Carr
  • METHOD FOR RECYCLING/RECLAIMING A MONITOR WAFER
    Publication number: 20100144065
    Abstract: The invention provides a method for recycling/reclaiming a monitor or test wafer and a method for testing an integrated circuit manufacturing process. After a monitor wafer has been used for testing one or more semiconductor wafer processing steps to determine adequacy for use with production wafers, deposited materials and other residues from the tested processing steps are removed, and the stripped wafer is subjected to a thermal anneal to repair defects in its surface and return it to a reusable condition.
    Type: Application
    Filed: November 18, 2009
    Publication date: June 10, 2010
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Gary C. Barrett, Bradley D. Sucher, Colin L. Carr