Abstract: The invention is directed to hermetically sealed optical lithography components or elements that are hermetically sealed by a durable coat of a hermetically sealing material selected from the group consisting of oxide and fluorinated oxide films. The durable coating of the hermetically sealing material is applied to one of more faces of the optical element, either directly to the face of the element or over a selected coating (for example, an anti-reflective coating) that has been applied to the element. The invention is further directed to a method of making hermetically sealed optical elements.

Abstract: The present invention relates to optical systems, beam expanding assemblies, line narrowing modules, and lasers having refractive optical elements with wavefront correcting optical surfaces. The present invention enables the skilled artisan to provide optical systems, beam expanding assemblies, line narrowing modules, and lasers having improved optical properties, such as, in the case of lasers, narrow linewidth at high power, and substantially planar wavefronts.