Patents by Inventor Colleen H. Ellenwood

Colleen H. Ellenwood has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and articles for accurately determining relative positions of lithographic artifacts
    Patent number: 5373232
    Abstract: A prepatterned potentiometer precursor includes a precursor substrate; and at least two spaced apart potentiometer precursor patterns on the substrate, each potentiometer precursor pattern including a bridge, two substantially similar end taps transverse to and extending from the bridge, and a center tap transverse to and extending from the bridge and centrally disposed between the end taps wherein the center taps of the bridges are substantially parallel to each other and are substantially wider than the end taps. A method of determining the distance between test features of test patterns on a test piece includes preparing a precursor substrate including at least two electrically conducting spaced apart potentiometer precursor patterns, each potentiometer precursor pattern including a bridge, two substantially similar end taps transverse to and extending from the bridge, and a center tap transverse to and extending from the bridge and centrally disposed between the end taps.
    Type: Grant
    Filed: March 19, 1993
    Date of Patent: December 13, 1994
    Assignee: The United States of America as represented by the Secretary of Commerce
    Inventors: Michael W. Cresswell, Richard A. Allen, Loren W. Linholm, Colleen H. Ellenwood, William B. Penzes, E. Clayton Teague