Abstract: A soft-acting and non-deforming vacuum suction device includes a vacuum generating structure and a suction head. The suction head includes a positioning block and a suction nozzle. The positioning block defines a through hole. The vacuum generating structure is open to the through hole, so that the nozzle pulls on or releases a workpiece by creating or releasing the vacuum of the through hole. When the workpiece to be transferred is pulled to the suction nozzle, the workpiece abuts softly against a first surface of the positioning block.