Patents by Inventor Connor Liston
Connor Liston has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240136152Abstract: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.Type: ApplicationFiled: October 23, 2023Publication date: April 25, 2024Inventors: Kenneth Miller, John Carscadden, Ilia Slobodov, Timothy Ziemba, Huatsern Yeager, Eric Hanson, TaiSheng Yeager, Kevin Muggli, Morgan Quinley, James Prager, Connor Liston
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Patent number: 11967484Abstract: A pulse generator is disclosed. The pulse generator includes a DC source; a plurality of switches, a transformer; and a pulsing output. The pulse generator can be coupled with a plasma chamber. The pulsing output outputs high voltage pulses having a peak-to-peak voltage greater than 1 kV and a voltage portion between consecutive high voltage bipolar pulses that has a negative slope that substantially offsets the voltage reduction on a wafer within a plasma chamber due to an ion current. The resulting voltage at the wafer may be substantially flat between consecutive pulses.Type: GrantFiled: October 4, 2021Date of Patent: April 23, 2024Assignee: Eagle Harbor Technologies, Inc.Inventors: Christopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
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Patent number: 11860126Abstract: Some embodiments of the invention may include an eddy current nondestructive evaluation device. The eddy current nondestructive evaluation device may include a rotating body; a motor coupled with the rotating body such that the motor rotates the rotating body; a permanent magnet coupled with the rotating body; a pickup coil coupled with the rotating body; and an integrator circuit electrically coupled with the pickup coil that integrates a voltage from the pickup coil to produce integrated voltage data.Type: GrantFiled: October 4, 2021Date of Patent: January 2, 2024Assignee: EHT Ventures LLCInventors: James R. Prager, Timothy M. Ziemba, Kenneth E. Miller, Ilia Slobodov, Paul Melnik, Connor Liston, Kevin Muggli, TaiSheng Yeager, John G. Carscadden
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Patent number: 11810761Abstract: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.Type: GrantFiled: August 24, 2021Date of Patent: November 7, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Ilia Slobodov, John Carscadden, Kenneth Miller, Timothy Ziemba, Huatsern Yeager, Eric Hanson, TaiSheng Yeager, Kevin Muggli, Morgan Quinley, James Prager, Connor Liston
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Patent number: 11728138Abstract: In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 m?1.25?; and a snubber capacitor having a capacitance of about 2 ?F-35 ?F.Type: GrantFiled: June 27, 2022Date of Patent: August 15, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Christopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
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Publication number: 20230073797Abstract: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an output electrically coupled with the transformer producing a waveform. In some embodiments, the waveform includes a plurality of high voltage pulses having a pulse amplitude greater than about 2 kV, a pulse width, and a pulse repetition frequency; and a sinusoidal waveform having a waveform frequency and a waveform amplitude greater than 100 V.Type: ApplicationFiled: November 14, 2022Publication date: March 9, 2023Inventors: Christopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
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Patent number: 11587768Abstract: Some embodiments include a thermal management system for a nanosecond pulser. In some embodiments, the thermal management system may include a switch cold plates coupled with switches, a core cold plate coupled with one or more transformers, resistor cold plates coupled with resistors, or tubing coupled with the switch cold plates, the core cold plates, and the resistor cold plates. The thermal management system may include a heat exchanger coupled with the resistor cold plates, the core cold plate, the switch cold plate, and the tubing. The heat exchanger may also be coupled with a facility fluid supply.Type: GrantFiled: April 15, 2021Date of Patent: February 21, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, Connor Liston
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Publication number: 20220328287Abstract: In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 m?1.25?; and a snubber capacitor having a capacitance of about 2 ?F-35 ?F.Type: ApplicationFiled: June 27, 2022Publication date: October 13, 2022Inventors: Christopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
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Patent number: 11404247Abstract: In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 m?-1.25?; and a snubber capacitor having a capacitance of about 2 ?F-35 ?F.Type: GrantFiled: July 9, 2021Date of Patent: August 2, 2022Assignee: Eagle Harbor Technologies, Inc.Inventors: Christopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
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Publication number: 20220037122Abstract: A pulse generator is disclosed. The pulse generator includes a DC source; a plurality of switches, a transformer; and a pulsing output. The pulse generator can be coupled with a plasma chamber. The pulsing output outputs high voltage pulses having a peak-to-peak voltage greater than 1 kV and a voltage portion between consecutive high voltage bipolar pulses that has a negative slope that substantially offsets the voltage reduction on a wafer within a plasma chamber due to an ion current. The resulting voltage at the wafer may be substantially flat between consecutive pulses.Type: ApplicationFiled: October 4, 2021Publication date: February 3, 2022Inventors: Christopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
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Publication number: 20220026393Abstract: Some embodiments of the invention may include an eddy current nondestructive evaluation device. The eddy current nondestructive evaluation device may include a rotating body; a motor coupled with the rotating body such that the motor rotates the rotating body; a permanent magnet coupled with the rotating body; a pickup coil coupled with the rotating body; and an integrator circuit electrically coupled with the pickup coil that integrates a voltage from the pickup coil to produce integrated voltage data.Type: ApplicationFiled: October 4, 2021Publication date: January 27, 2022Inventors: James R. Prager, Timothy M. Ziemba, Kenneth E. Miller, Ilia Slobodov, Paul Melnik, Connor Liston, Kevin Muggli, TaiSheng Yeager, John G. Carscadden
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Publication number: 20220020566Abstract: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.Type: ApplicationFiled: August 24, 2021Publication date: January 20, 2022Inventors: Ilia Slobodov, John Carscadden, Kenneth Miller, Timothy Ziemba, Huatsern Yeager, Eric Hanson, TaiSheng Yeager, Kevin Muggli, Morgan Quinley, James Prager, Connor Liston
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Publication number: 20220013329Abstract: In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 m?-1.25?; and a snubber capacitor having a capacitance of about 2 ?F-35 ?F.Type: ApplicationFiled: July 9, 2021Publication date: January 13, 2022Inventors: Christopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
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Publication number: 20210351009Abstract: Some embodiments include a thermal management system for a nanosecond pulser. In some embodiments, the thermal management system may include a switch cold plates coupled with switches, a core cold plate coupled with one or more transformers, resistor cold plates coupled with resistors, or tubing coupled with the switch cold plates, the core cold plates, and the resistor cold plates. The thermal management system may include a heat exchanger coupled with the resistor cold plates, the core cold plate, the switch cold plate, and the tubing. The heat exchanger may also be coupled with a facility fluid supply.Type: ApplicationFiled: April 15, 2021Publication date: November 11, 2021Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, Connor Liston
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Patent number: 11137372Abstract: Some embodiments of the invention may include an eddy current nondestructive evaluation device. The eddy current nondestructive evaluation device may include a rotating body; a motor coupled with the rotating body such that the motor rotates the rotating body; a permanent magnet coupled with the rotating body; a pickup coil coupled with the rotating body; and an integrator circuit electrically coupled with the pickup coil that integrates a voltage from the pickup coil to produce integrated voltage data.Type: GrantFiled: March 8, 2019Date of Patent: October 5, 2021Assignee: EAGLE HARBOR TECHNOLOGIES, INC.Inventors: James R. Prager, Timothy M. Ziemba, Kenneth E. Miller, Ilia Slobodov, Paul Melnik, Connor Liston, Kevin Muggli, TaiSheng Yeager, John G. Carscadden
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Patent number: 10991553Abstract: Some embodiments include a thermal management system for a nanosecond pulser. In some embodiments, the thermal management system may include a switch cold plates coupled with switches, a core cold plate coupled with one or more transformers, resistor cold plates coupled with resistors, or tubing coupled with the switch cold plates, the core cold plates, and the resistor cold plates. The thermal management system may include a heat exchanger coupled with the resistor cold plates, the core cold plate, the switch cold plate, and the tubing. The heat exchanger may also be coupled with a facility fluid supply.Type: GrantFiled: July 29, 2019Date of Patent: April 27, 2021Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, Connor Liston
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Publication number: 20210029815Abstract: Some embodiments include a plasma system that includes a plasma chamber; an RF driver driving RF bursts into the plasma chamber with an RF frequency greater than 2 MHz; a nanosecond pulser driving pulses into the plasma chamber with a pulse repetition frequency a peak voltage, the pulse repetition frequency being less than the RF frequency and the peak voltage being greater than 2 kV; a first filter disposed between the RF driver and the plasma chamber; and a second filter disposed between the nanosecond pulser and the plasma chamber.Type: ApplicationFiled: July 1, 2020Publication date: January 28, 2021Inventors: Christopher Bowman, Connor Liston, Nicolas A. Yang, Kenneth Miller, Ilia Slobodov, Timothy Ziemba
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Publication number: 20200037468Abstract: Some embodiments include a thermal management system for a nanosecond pulser. In some embodiments, the thermal management system may include a switch cold plates coupled with switches, a core cold plate coupled with one or more transformers, resistor cold plates coupled with resistors, or tubing coupled with the switch cold plates, the core cold plates, and the resistor cold plates. The thermal management system may include a heat exchanger coupled with the resistor cold plates, the core cold plate, the switch cold plate, and the tubing. The heat exchanger may also be coupled with a facility fluid supply.Type: ApplicationFiled: July 29, 2019Publication date: January 30, 2020Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, Connor Liston
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Publication number: 20190277804Abstract: Some embodiments of the invention may include an eddy current nondestructive evaluation device. The eddy current nondestructive evaluation device may include a rotating body; a motor coupled with the rotating body such that the motor rotates the rotating body; a permanent magnet coupled with the rotating body; a pickup coil coupled with the rotating body; and an integrator circuit electrically coupled with the pickup coil that integrates a voltage from the pickup coil to produce integrated voltage data.Type: ApplicationFiled: March 8, 2019Publication date: September 12, 2019Inventors: James R. Prager, Timothy M. Ziemba, Kenneth E. Miller, Iia Slobodov, Paul Melnik, Connor Liston, Kevin Muggli, TaiSheng Yeager, John G. Carscadden