Patents by Inventor Corey Staller

Corey Staller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11387369
    Abstract: An example apparatus includes forming a working surface of a substrate material. The example apparatus includes trench formed between two semiconductor structures on the working surface of the substrate material. The example apparatus further includes access lines formed on neighboring sidewalls of the semiconductor structures opposing a channel region separating a first source/drain region and a second source/drain region. The example apparatus further includes a time-control formed inhibitor material formed over a portion of the sidewalls of the semiconductor structures. The example apparatus further includes a dielectric material formed over the semiconductor structures to enclose a non-solid space between the access lines.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: July 12, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Shen Hu, Hung-Wei Liu, Xiao Li, Zhiqiang Xie, Corey Staller, Jeffery B. Hull, Anish A. Khandekar, Thomas A. Figura
  • Publication number: 20220093467
    Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. A stair-step structure is formed into the stack. A first liquid is applied onto the stair-step structure. The first liquid comprises insulative physical objects that individually have at least one of a maximum submicron dimension or a minimum submicron dimension. The first liquid is removed to leave the insulative physical objects touching one another and to have void-spaces among the touching insulative physical objects. A second liquid that is different from the first liquid is applied into the void-spaces. The second liquid is changed into a solid insulative material in the void-spaces. Other embodiments, including structure, are disclosed.
    Type: Application
    Filed: December 6, 2021
    Publication date: March 24, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Corey Staller, Anilkumar Chandolu
  • Patent number: 11222825
    Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. A stair-step structure is formed into the stack. A first liquid is applied onto the stair-step structure. The first liquid comprises insulative physical objects that individually have at least one of a maximum submicron dimension or a minimum submicron dimension. The first liquid is removed to leave the insulative physical objects touching one another and to have void-spaces among the touching insulative physical objects. A second liquid that is different from the first liquid is applied into the void-spaces. The second liquid is changed into a solid insulative material in the void-spaces. Other embodiments, including structure, are disclosed.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: January 11, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Corey Staller, Anilkumar Chandolu
  • Publication number: 20210287943
    Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. A stair-step structure is formed into the stack. A first liquid is applied onto the stair-step structure. The first liquid comprises insulative physical objects that individually have at least one of a maximum submicron dimension or a minimum submicron dimension. The first liquid is removed to leave the insulative physical objects touching one another and to have void-spaces among the touching insulative physical objects. A second liquid that is different from the first liquid is applied into the void-spaces. The second liquid is changed into a solid insulative material in the void-spaces. Other embodiments, including structure, are disclosed.
    Type: Application
    Filed: March 10, 2020
    Publication date: September 16, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Corey Staller, Anilkumar Chandolu
  • Publication number: 20210193843
    Abstract: An example apparatus includes forming a working surface of a substrate material. The example apparatus includes trench formed between two semiconductor structures on the working surface of the substrate material. The example apparatus further includes access lines formed on neighboring sidewalls of the semiconductor structures opposing a channel region separating a first source/drain region and a second source/drain region. The example apparatus further includes a time-control formed inhibitor material formed over a portion of the sidewalls of the semiconductor structures. The example apparatus further includes a dielectric material formed over the semiconductor structures to enclose a non-solid space between the access lines.
    Type: Application
    Filed: December 20, 2019
    Publication date: June 24, 2021
    Inventors: Shen Hu, Hung-Wei Liu, Xiao Li, Zhiqiang Xie, Corey Staller, Jeffery B. Hull, Anish A. Khandekar, Thomas A. Figura