Patents by Inventor Corina E. Tanasa

Corina E. Tanasa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lamp array for thermal processing exhibiting improved radial uniformity
    Patent number: 7509035
    Abstract: A thermal processing chamber includes a substrate support rotating about a center axis and a lamphead of plural lamps in an array having a predetermined difference in radiance pattern between them. The radiance pattern includes a variation in diffuseness or collimation. In one embodiment, the center lines of all of the lamps are disposed away from the center axis. The array can be an hexagonal array, in which the center axis is located at a predetermined position between neighboring lamps.
    Type: Grant
    Filed: August 2, 2005
    Date of Patent: March 24, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Joseph M. Ranish, Corina E. Tanasa, Sundar Ramamurthy, Claudia Lai, Ravi Jallepally, Ramachandran Balasubramanian, Aaron M. Hunter, Agus Tjandra, Norman Tam