Patents by Inventor Cornel Danciu

Cornel Danciu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shielding assembly for semiconductor manufacturing apparatus and method of using the same
    Patent number: 7772576
    Abstract: A shielding assembly for use in a semiconductor manufacturing apparatus, such as an ion implantation apparatus, includes one or more removable shielding members configured to cover inner surfaces of a mass analyzing chamber. The shielding assembly reduces process by-products from accumulating on the inner surfaces. In one embodiment, a shielding assembly includes first and second shielding members, each having a unitary construction and configured to cover a magnetic area in the mass analyzing chamber. The shielding members desirably are made entirely of graphite or impregnated graphite to minimize contamination of the semiconductor device being processed caused by metal particles eroded from the inner surfaces of the mass analyzing chamber.
    Type: Grant
    Filed: April 24, 2008
    Date of Patent: August 10, 2010
    Assignee: Toyo Tanso Co., Ltd.
    Inventors: Cornel Danciu, Thomas Abels, Brian Good
  • Shielding assembly for semiconductor manufacturing apparatus and method of using the same
    Publication number: 20080203330
    Abstract: A shielding assembly for use in a semiconductor manufacturing apparatus, such as an ion implantation apparatus, includes one or more removable shielding members configured to cover inner surfaces of a mass analyzing chamber. The shielding assembly reduces process by-products from accumulating on the inner surfaces. In one embodiment, a shielding assembly includes first and second shielding members, each having a unitary construction and configured to cover a magnetic area in the mass analyzing chamber. The shielding members desirably are made entirely of graphite or impregnated graphite to minimize contamination of the semiconductor device being processed caused by metal particles eroded from the inner surfaces of the mass analyzing chamber.
    Type: Application
    Filed: April 24, 2008
    Publication date: August 28, 2008
    Inventors: Cornel Danciu, Thomas Abels, Brian Good
  • Shielding assembly for a semiconductor manufacturing apparatus and method of using the same
    Patent number: 7378670
    Abstract: A shielding assembly for use in a semiconductor manufacturing apparatus, such as an ion implantation apparatus, includes one or more removable shielding members configured to cover inner surfaces of a mass analyzing chamber. The shielding assembly reduces process by-products from accumulating on the inner surfaces. In one embodiment, a shielding assembly includes first and second shielding members, each having a unitary construction and configured to cover a magnetic area in the mass analyzing chamber. The shielding members desirably are made entirely of graphite or impregnated graphite to minimize contamination of the semiconductor device being processed caused by metal particles eroded from the inner surfaces of the mass analyzing chamber.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: May 27, 2008
    Assignee: Toyo Tanso Co., Ltd.
    Inventors: Cornel Danciu, Thomas Abels, Brian Good
  • Shielding assembly for a semiconductor manufacturing apparatus and method of using the same
    Publication number: 20030038252
    Abstract: A shielding assembly for use in a semiconductor manufacturing apparatus, such as an ion implantation apparatus, includes one or more removable shielding members configured to cover inner surfaces of a mass analyzing chamber. The shielding assembly reduces process by-products from accumulating on the inner surfaces. In one embodiment, a shielding assembly includes first and second shielding members, each having a unitary construction and configured to cover a magnetic area in the mass analyzing chamber. The shielding members desirably are made entirely of graphite or impregnated graphite to minimize contamination of the semiconductor device being processed caused by metal particles eroded from the inner surfaces of the mass analyzing chamber.
    Type: Application
    Filed: June 21, 2002
    Publication date: February 27, 2003
    Applicant: Toyo Tanso Co., Ltd.
    Inventors: Cornel Danciu, Thomas Abels, Brian Good