Abstract: A Lidar system, a mirror assembly for a Lidar system and method of operating the mirror assembly. The mirror assembly of the Lidar system includes a first frame and a first conductor. The first frame is rotatable about a first axis. The first conductor extends along the first frame to one side of the first axis. The first conductor extends through a first magnetic field on the one side of the first axis in a direction parallel to the first axis. A first current is passed through the first conductor to interact with the first magnetic field to induce a first rotation of the first frame about the first axis.

Abstract: A Lidar system, a mirror assembly for a Lidar system and method of operating the mirror assembly. The mirror assembly of the Lidar system includes a first frame and a first conductor. The first frame is rotatable about a first axis. The first conductor extends along the first frame to one side of the first axis. The first conductor extends through a first magnetic field on the one side of the first axis in a direction parallel to the first axis. A first current is passed through the first conductor to interact with the first magnetic field to induce a first rotation of the first frame about the first axis.

Abstract: A micromechanical device includes an actuator moveable along at least one rotational axis, and an electromagnetic type actuating device. The rotor is composed of a wire coil mounted on a moveable frame, which is rotationally integral with the actuator. The coil conducts the electric current. Protruding strands form a loop proximate the torsional beam. In another embodiment, the coil terminates through its two ends located on the moveable frame. The ends of the coil are each welded to one of the metal plates terminating on the moveable frame. Starting from the power supply pads on the fixed frame, the conductive lines transit through the torsional beam to join the ends of coil on the moveable frame. To make several plates going through one of the torsional beams, the beams are isolated electrically by a groove.

Abstract: A micromechanical device with electromagnetic actuation includes a base and a micro electro mechanical system (MEMS). The MEMS includes a mobile rotating element based on one or two axes of rotation. The base includes stators each forming a first internal pole, an external pole and an air gap. In order to increase the reliability and the mechanical stability of the device, the first internal poles are mounted in a connected manner to each other onto the base.

Abstract: The invention relates to an optical accelerometer, comprising a seismic mass, equipped with a mobile reflective surface, according to a rotating axis, an emitting optical fiber, coupled with a light source, intended to emit a light beam, through one of its edges, in the direction of the reflective surface, and a receiving optical fiber, coupled with an optical detector, intended to receive, through one of its edges-, the light beam sent back by the reflective surface. The arrangement of the ensemble is such that a rotating movement of the reflective surface leads to a deflection of the light beam and a variation in the light intensity received by the receiving fiber. According to the invention, a convergent lens is interposed, on the optical path of the light beam, between the optical fibers and the seismic mass.

Abstract: The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.

Abstract: The invention concerns a micromechanical element (1) including a frame (10), a moving part (12) rotating inside said frame (10), about an axis AA, two torsion beams (14) connecting the moving part (12) to said frame (10), aligned along the axis AA and provided with a portion (15) of reinforced width, and stop members (16) arranged on both sides of the reinforced portions (15), so as to limit the lateral movement of the moving part (12). According to the invention, the portions (15) of reinforced width are integral with the frame (10), and the stop members (16) are integral with the moving part (12).

Abstract: The invention relates to an optical filter comprising an optical source (2), emitting a light beam comprising a plurality of wavelengths, an optical receiver (3), and, optically aligned between the source (2) and receiver (3), at least one collimating and converging optical element (10), one dispersive optical element (20) capable of angularly separating the wavelengths, and a reflecting element (30) mobile about an axis (AA) capable, depending on its orientation about the axis (AA), of reflecting a specific wavelength toward the optical receiver (3). The optical elements (10, 20, 30) are arranged so that the light beam passes at least once through the dispersive element (20) before reaching the optical receiver (3). According to the invention the reflecting element (30) includes at least two faces (31, 32) defining a first and a second plane intersecting on a line parallel to the axis (AA) of rotation of the reflecting element (30).

Abstract: A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.

Abstract: A coupling device (1, 2) for optical fibres (19) comprises a first sheet (11) equipped with a plurality of through-holes (13), of which a portion 13a, at least, has a diameter adjusted to the diameter of said optical fibres (19), and a second sheet (12) joined to said first sheet (11) by a face. Said device (1, 2) also comprises a third sheet (15), joined to said first sheet (11), and equipped with a plurality of through-holes (16), of which a portion (16a), at least, has a diameter adjusted to the diameter of said optical fibres (19), aligned relative to the holes (13) of said first sheet (11), so as to form recesses (18, 25) with which said optical fibres (19) are engaged.

Abstract: A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.

Abstract: A micromirror device (21) comprises an electrostatically actuable micromirror (25) and also a frame (27) and a base (9). The micromirror (25) is cardanically suspended in the base (9) via the frame (27) in that it is connected to the frame (27) via two articulated joints and the frame (27) is connected to the base (9) via two further articulated joints. In this way, the micromirror (25) can be actuated by application of an electrical voltage to correspondingly positioned electrodes, that is to say that one or both of the rotation axes defined by the two pairs of articulated joints are pivoted. The micromirror is then suspended in such a way that the two articulated joints defining one of the two rotation axes each comprise a torsion spring and the other two articulated joints defining the other of the two rotation axes each comprise a bending spring.

Abstract: A bistable MEMS switch for use in selectively opening or closing electrical circuits included in an implantable medical device system is provided. The switch includes a central movable beam having a movable contact; a suspension system for supporting the movable beam and generating a contact force; an actuator for displacing the beam upon application of an activation signal, and a fixed contact for interfacing the movable contact when the switch is in a closed state. The switch is fabricated from a Si/SiO2/Si wafer using photolithography, DRIE and sacrificial oxide etching followed by metalization of electrical contact points with a wear-resistant metal or alloy. An actuation layer may be fabricated from the silicon substrate layer of the wafer and the signal layer may be fabricated from the top silicon layer. The actuation layer and signal layer are thereby electrically decoupled and mechanically coupled by the intervening SiO2 layer.

Abstract: A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.

Abstract: A bistable MEMS switch for use in selectively opening or closing electrical circuits included in an implantable medical device system is provided. The switch includes a central movable beam having a movable contact; a suspension system for supporting the movable beam and generating a contact force; an actuator for displacing the beam upon application of an activation signal, and a fixed contact for interfacing the movable contact when the switch is in a closed state. The switch is fabricated from a Si/SiO2/Si wafer using photolithography, DRIE and sacrificial oxide etching followed by metalization of electrical contact points with a wear-resistant metal or alloy. An actuation layer may be fabricated from the silicon substrate layer of the wafer and the signal layer may be fabricated from the top silicon layer. The actuation layer and signal layer are thereby electrically decoupled and mechanically coupled by the intervening SiO2 layer.

Abstract: The radiation guide switching arrangement having at least one radiation guide switch is produced from a sandwich wafer. The sandwich wafer has a substrate, a covering layer and an electrically insulating intermediate layer. Each radiation guide switch has a moveable switching part (7) as well as at least two radiation guide ends (6), which come to rest in a plane and are arranged closely adjacent to one another such that radiation which emerges from one radiation guide end (6) can be blocked on its optical path to another guide end (6), or can be reflected into this other guide end, by means of the switching part (7).

Abstract: The radiation guide switching arrangement having at least one radiation guide switch is produced from a sandwich wafer. The sandwich wafer has a substrate, a covering layer and an electrically insulating intermediate layer. Each radiation guide switch has a moveable switching part (7) as well as at least two radiation guide ends (6), which come to rest in a plane and are arranged closely adjacent to one another such that radiation which emerges from one radiation guide end (6) can be blocked on its optical path to another guide end (6), or can be reflected into this other guide end, by means of the switching part (7).

Abstract: A fiber Optic circuit switch comprises elements constructed entirely from a coating layer on a substrate. A procedure for production of the fiber optic circuit switch is disclosed.

Abstract: A bi-stable micro-machined electromechanical system (“MEMS”) switch. In a preferred embodiment, the bi-stable MEMS switch is used in an N×N optical signal switching system. Spring arms act in conjunction with a hollow beam portion of a movable center body of the switch to accommodate strain in the arms as the switch is moved from a first position to a second position, thus avoiding buckling of the spring arms. Both the first and second switch position occur at local minimums of mechanical potential energy, thus providing two stable switch states. The center body is moved in relation to static portions of the switch by an actuator, such as an electro-static comb drive.