Patents by Inventor Cornelia Roesch

Cornelia Roesch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adjustment arrangement of an optical element
    Patent number: 7656595
    Abstract: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
    Type: Grant
    Filed: September 17, 2008
    Date of Patent: February 2, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl
  • Adjustment Arrangement of an Optical Element
    Publication number: 20090009892
    Abstract: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
    Type: Application
    Filed: September 17, 2008
    Publication date: January 8, 2009
    Applicant: CARL ZEISS SMT AG
    Inventors: Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl
  • Adjustment arrangement of an optical element
    Patent number: 7457059
    Abstract: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: November 25, 2008
    Assignee: Carl Zeiss SMT AG
    Inventors: Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl
  • Adjustment arrangement of an optical element
    Patent number: 7193794
    Abstract: An arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
    Type: Grant
    Filed: February 13, 2004
    Date of Patent: March 20, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl
  • ADJUSTMENT ARRANGEMENT OF AN OPTICAL ELEMENT
    Publication number: 20070014038
    Abstract: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
    Type: Application
    Filed: September 20, 2006
    Publication date: January 18, 2007
    Inventors: Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl
  • Adjustment arrangement of an optical element
    Publication number: 20040174619
    Abstract: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
    Type: Application
    Filed: February 13, 2004
    Publication date: September 9, 2004
    Applicant: Carl Zeiss SMT AG
    Inventors: Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl