Abstract: A lithographic device comprising a mask table (5), a projection system (3), a substrate table (1) which is displaceable relative to the projection system (3) by means of a drive unit (21), and a measuring system (39) for measuring a position of the substrate table (1) relative to the projection system (3). A stationary part (157) of the drive unit (21) is fastened to a machine frame (85) of the lithographic device, while a stationary part (51, 53, 55) of the measuring system (39) is fastened to a reference frame (89) of the lithographic device which is dynamically isolated from the machine frame (85) by means of dynamic isolators (95). This prevents vibrations caused in the machine frame (85) by reaction forces of the drive unit (21) from being transmitted to the reference frame (89), so that the accuracy of the measuring system (39) is not adversely affected by such vibrations.

Abstract: A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.

Abstract: A lithographic device with a lithographic irradiation system (1, 13) which is fastened near a lower side to a mounting member (5) of a frame (7). The device is provided with a unit (65) which is formed by a positioning device (37), with which an object table (21) arranged below the irradiation system (1, 13) is displaceable, and by a support member (35), over which the object table (21) is guided by means of an aerostatic foot (31). In an operational position, the unit (65) is coupled to a carrier (67) by means of coupling members (73), the carrier (67) being suspended from the mounting member (5) by means of suspension elements (79, 81, 83), so that the unit (65) is arranged between lower frame supports (25) of the frame (7) and a compact construction is obtained.The unit (65) can be rotated from the operational position to an end position, in which the unit (65) is entirely outside the frame (7) and is easily accessible for maintenance, by means of a rotation mechanism (87) and a swivel mechanism (89).

Abstract: A sintering press for comprising a stack of foils is formed of a lower die, an upper die opposing the lower die and a furnance surrounding the dies. At least one of the two dies is supported at its end face remote from the other die by a spherical bearing surface so that this die can adjust itself by tilting so that the center lines of the two dies are no longer in line with each other. As a result, a uniform pressure distribution is obtained on the stack of foils.

Abstract: An electroacoustic transducer comprises a diaphragm (1), a magnet system (4) and a voice coil (3) arranged on a voice-coil former (2) in an air gap (5) of the magnet system. The movement is transmitted between the voice-coil former and the diaphragm via a lever mechanism comprising n lever devices (6) arranged at an angle relative to each other (n.gtoreq.2). A lever device (6) comprises a lever arm (9) coupled to a fulcrum (11) at the location of a first position (10) on the lever arm, to the voice-coil former (2) at the location of a second position (13), and to the diaphragm (1) at the location of a third position (14). The lever mechanism multiplies the excursion of the voice-coil former by a factor greater than unity. This results in an electroacoustic transducer with a long stroke which provides large excursions of the diaphragm. The lever mechanism may also be employed in other types of transducer, such as piezo-ceramic transducers.

Abstract: A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.