Patents by Inventor Cornelis J. P. M. Rooyackers

Cornelis J. P. M. Rooyackers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning optical microscope with position detection grating
    Patent number: 4861982
    Abstract: A beam splitter (120) arranged in the radiation path of the scanning beam splits off a reference beam synchronously moving with the scanning spot (21) to a reference plane (140). The movement of the scanning spot (21) can be checked by measuring, with the aid of a radiation detector (160), the movement of a reference spot (121) formed by the reference beam in the reference plane. In this way an accurate determination of the position of the scanning spot (21) is possible while using simple beam-deflecting elements (40,42) having a relatively low accuracy. A cylindrical lens (131) gives the scanning spot the shape of a line, so that sensitivity to dust and other contaminations on the reference plane is reduced considerably.
    Type: Grant
    Filed: July 15, 1988
    Date of Patent: August 29, 1989
    Assignee: U.S. Philips Corporation
    Inventors: Albert Smid, Antonius H. M. Akkermans, Jozef P. H. Benschop, Cornelis J. P. M. Rooyackers