Patents by Inventor Cornelis Jacobus Van Duijn

Cornelis Jacobus Van Duijn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
    Patent number: 7030958
    Abstract: An optical attenuator device operates to remove a part of a beam of radiation having a higher than average intensity using at least one optical attenuator element. The device has application in a radiation system, and/or a lithographic apparatus, in particular a scanning lithographic apparatus, wherein the optical attenuator element(s) are provided in a central part of the beam, for example perpendicularly to a scanning direction.
    Type: Grant
    Filed: December 31, 2003
    Date of Patent: April 18, 2006
    Assignee: ASML Netherlands B.V.
    Inventors: Cornelis Petrus Andreas Marie Luijkx, Vadim Yevgenyevich Banine, Hako Botma, Martinus Van Duijnhoven, Markus Franciscus Antonius Eurlings, Heine Melle Mulder, Johannes Hendrik Everhardus Aldegonda Muijderman, Cornelis Jacobus Van Duijn, Jan Jaap Krikke