Abstract: A lithographic apparatus is disclosed in which a circular sensor is mounted to a substrate table with three leaf springs that are evenly spaced around a thermal axis of the sensor. The leaf springs are provided in two parts that are releasably attachable to each other. The leaf springs are elastic and allow some movement of the sensor relative to the substrate table on thermal expansion and contraction but ensure that the thermal center of the sensor does not move relative to the substrate table.

Abstract: A lithographic apparatus includes a measurement system including at least one optical component and at least one electrical component. The electrical component is configured to dissipate heat. The optical component is mounted on a first frame of the apparatus, and the electrical component is mounted on a second frame of the apparatus that is thermally and mechanically decoupled from the first frame. An optical coupling is provided between the first frame and the second frame.

Abstract: The invention pertains to a process for the operation of a mouthpiece for the intermittent supply of an adhesive through at least one discharge opening to a surface moving with respect to this mouthpiece, where at least in the pauses between discharges, the edges of the discharge openings are sprayed with a rinsing medium. The invention also pertains to a mouthpiece for the application of an adhesive with one or more rinsing medium discharge openings situated upstream from the glue discharge openings. As a result of these measures, glue residues are effectively prevented from accumulating at the edges of the discharge openings.