Abstract: The invention relates to a method for analyzing an analogue signal comprising randomly spaced events having an event height. The method includes irradiating a sample with a focused beam of energetic electrons, detecting emission from the sample in response to such irradiation, and converting an analog signal of the emissions to a stationary time signal. The method further includes determining an estimated noise contribution for the stationary time signal, and determining an estimated event height of an event based on the stationary time signal and the estimated noise contribution for the stationary time signal, and determining, based on the estimated event height, an energy of the emission detected by the detector. This method is particularly useful for X-ray detectors, such as Silicon Drift Detectors, used in a SEM. By estimating the noise contribution to the signal, the step height is estimated with improved accuracy.

Abstract: The invention relates to a method for analyzing an analogue signal comprising randomly spaced events having an event height. The method includes irradiating a sample with a focused beam of energetic electrons, detecting emission from the sample in response to such irradiation, and converting an analog signal of the emissions to a stationary time signal. The method further includes determining an estimated noise contribution for the stationary time signal, and determining an estimated event height of an event based on the stationary time signal and the estimated noise contribution for the stationary time signal, and determining, based on the estimated event height, an energy of the emission detected by the detector. This method is particularly useful for X-ray detectors, such as Silicon Drift Detectors, used in a SEM. By estimating the noise contribution to the signal, the step height is estimated with improved accuracy.

Abstract: A system for analyzing an analogue signal comprising randomly spaced events, the event having an event height, comprises: Converting the signal to a series of samples S(t), with t the moment of sampling, thereby forming a sampled, discrete time signal, Detecting the presence of an event, the event detected at t=T, Estimating the event height Using a model (412, FIG. 5) to estimate a noise contribution N(t) for t=(T??1) to t=(T+?2), the noise contribution derived from samples S(t) with t?(T??1) and/or samples S(t) with t?(T+?2), with ?1 and ?2 predetermined or preset time periods having a value such that the event has a negligible contribution to samples taken before (T??1) or after (T+?2), Estimating the event height E by integrating the series of samples from (T??1) to (T+?2) minus the noise contribution for said samples, E=?t=(T??1)t=(T+?2)S(t)??t=(T??1)t=(T+?2)N(t)=?t=(T??1)t=(T+?2)[S(t)?N(t)].

Abstract: The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to the raster scan or serpentine scan. In some embodiment, the beam scanning motion is separated into short-stroke and long-stroke movements, to be assigned to associate short-stroke and long-stroke scanning devices, which may be beam deflectors or stage actuators. The scan strategy which is less susceptible to effects such as overshoot, settling/resynchronization, and “backlash” effects.

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract: An improved spectroscopic analysis apparatus and method are disclosed, comprising directing a beam of radiation onto a measurement location on a specimen, thereby causing a flux of X-rays to emanate from this location; examining the X-ray flux using a detector arrangement, thus acquiring a spectrum; choosing a set of different measurement directions originating from the location; recording outputs from the detector arrangement for different measurement directions; adopting a spectral model that is a convoluted mix of terms B and Lp, where B is the Bremsstrahlung background spectrum and Lp comprises spectral lines corresponding to the specimen composition at the measurement location; and then automatically deconvolving the set of measurements on the basis of the spectral model to calculate Lp to determine the chemical composition of the specimen at the measurement location. The method includes corrections for differential X-ray absorption within the specimen along the different measurement directions.

Abstract: A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S1} of a set {Sn}, gathering data from a first collection of sparsely distributed sampling points {P1} of set {Pn}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}, and an image of the specimen is assembled using the set {Pn} as input to an integrative mathematical reconstruction procedure.

Abstract: Methods and systems are provided for a scanning microscope to rapidly form a partial digital image of an area. The method includes performing an initial scan for the area and using initial scan to identify regions representing features of interest in the area. Then, the method performs additional adaptive scans of the regions representing structures of interest. Such scans adapt the path of the scanning beam to follow the edges of a feature of interest by performing localized scan patterns that intersect the feature edge, and directing the localized scan patterns to follow the feature edge.

Abstract: Methods and systems are provided for a scanning microscope to rapidly form a partial digital image of an area. The method includes performing an initial scan for the area and using initial scan to identify regions representing features of interest in the area. Then, the method performs additional adaptive scans of the regions representing structures of interest. Such scans adapt the path of the scanning beam to follow the edges of a feature of interest by performing localized scan patterns that intersect the feature edge, and directing the localized scan patterns to follow the feature edge.

Abstract: A system for analyzing an analogue signal comprising randomly spaced events, the event having an event height, comprises: Converting the signal to a series of samples S(t), with t the moment of sampling, thereby forming a sampled, discrete time signal, Detecting the presence of an event, the event detected at t=T, Estimating the event height, Using a model (412, FIG. 5) to estimate a noise contribution N(t) for t=(T??1) to t=(T+?2), the noise contribution derived from samples S(t) with t?(T??1) and/or samples S(t) with t?(T+?2), with ?1 and ?2 predetermined or preset time periods having a value such that the event has a negligible contribution to samples taken before (T??1) or after (T+?2), Estimating the event height E by integrating the series of samples from (T??1) to (T+?2) minus the noise contribution for said samples, E=?t=(T??1)t=(T+?2)S(t)??t=(T??1)t=(T+?2)N(t)=?t=(T??1)t=(T+?2)[S(t)?N(t)].

Abstract: A spectroscopic analysis method, comprising: Directing a beam of radiation onto a location P on a specimen, thereby causing a flux of X-rays to emanate from said location; Examining said flux using a detector arrangement, thus accruing a measured spectrum; Choosing a set of mutually different measurement directions d={dn} that originate from P, where n is a member of an integer sequence; Recording an output On of said detector arrangement for different values of dn, thus compiling a measurement set M={(On, dn)}; Adopting a spectral model On? for On that is a convoluted mix of terms Band Lp, where: B is a substantially continuous spectral component associated with Bremsstrahlung; Lp is a substantially discrete spectral component associated with the specimen composition at location P; automatically deconvolving the measurement set Mon the basis of said spectral model On? and distill Lp therefrom.

Abstract: The invention relates to a method for analyzing the output signal of a silicon drift detector (SDD). A SDD is used for detecting X-rays emitted by a sample as a result of impinging radiation. The signal of a SDD comprises a number of randomly spaced steps, in which the step height is a function of the energy of the detected X-ray photon. The variance in step height is a function of the averaging time that can be used to determine the plateau between steps: averaging over a short interval results in more uncertainty of the plateau value than a long interval. By according a weight factor, a function of the variance such that a step with low variance (high reliability) is associated with a larger weight factor than a step with high variance (low reliability), measurement values with a low variance are emphasized. This results in better resolved spectra.

Abstract: The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to the raster scan or serpentine scan. In some embodiment, the beam scanning motion is separated into short-stroke and long-stroke movements, to be assigned to associate short-stroke and long-stroke scanning devices, which may be beam deflectors or stage actuators. The scan strategy which is less susceptible to effects such as overshoot, settling/resynchronization, and “backlash” effects.

Abstract: A pixelated CMOS radiation sensor (e.g. in a 4T pinned photodiode device) that comprises a layered structure including: A p-type Si substrate; An n-doped region within said substrate; A p+-doped pinning layer that overlies said n-doped region; An SiOx layer that overlies said p+-doped pinning layer and serves as a Pre-Metal Dielectric or Inter-Metal Dielectric layer, in which a Boron film is deposited between said p+-doped pinning layer and said SiOx layer. Application of such a (pure) Boron film serves to reduce leakage current by one or more orders of magnitude. Even a relatively thin Boron film (e.g. thickness 1-2 nm) can produce this effect.

Abstract: A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, which method additionally comprises the following steps: In a first sampling session S1gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen; Repeating this procedure so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1; Assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure, wherein, as part of

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract: A detector with a Silicon Diode and an amplifier, and a feedback element in the form of, for example, a resistor or a diode, switchably connected to the output of the amplifier. When the feedback element is selected via a switch, the detector operates in a Current Measurement Mode for determining electron current, and when the element is not selected the detector operates in its well-known Pulse Height Measurement Mode for determining the energy of X-ray quanta.

Abstract: Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.

Abstract: The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa.