Patents by Inventor Cornelius Ottens

Cornelius Ottens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatus
    Publication number: 20060109439
    Abstract: A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate. The apparatus includes an optical element, and at least two clamping assemblies for clamping the optical element. The clamping assemblies each include a first clamp with a first clamping surface in contact with a first surface of the optical element and a second clamp with a second clamping surface in contact with a second surface of said optical element, opposite said first surface of said optical element.
    Type: Application
    Filed: November 19, 2004
    Publication date: May 25, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Cornelius Ottens, Erik Rekkers