Patents by Inventor Cornell Weidelt

Cornell Weidelt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rotatable sputter target comprising an end-block with a liquid coolant supply system
    Patent number: 9058961
    Abstract: A tube target with an end block for supplying coolant to the tube target is provided. The end block comprises a rotatably mounted carrier shaft for holding and rotating the tube target; a connecting sleeve arranged in the carrier shaft; a sealing element for the tube target on its end facing the end block; a coolant inlet port in the interior of the tube target; and a coolant outlet port. The coolant outlet port is formed by at least one aperture in the sealing element. The aperture is located in the vicinity of the wall of the tube target, and eccentrically to the rotational axis of the tube target.
    Type: Grant
    Filed: May 6, 2009
    Date of Patent: June 16, 2015
    Assignee: VON ARDENNE GmbH
    Inventors: Thorsten Sander, Cornell Weidelt, Hans-Juergen Heinrich
  • Supply end block for rotary magnetron
    Patent number: 7938943
    Abstract: A supply end block to supply a sputter cathode with a coolant and electrical voltage, includes a housing with a coolant connection and a current connection as well as a support shaft mounted to rotate, on which a target tube is fastened. The coolant connection and current connection are brought together directly at a feed site so that the coolant is brought to the potential of the applied electric voltage on entering the housing of the end block. Optimal cooling of the current feed is achieved, and optimal potential equalization of the coolant simultaneously occurs.
    Type: Grant
    Filed: October 17, 2007
    Date of Patent: May 10, 2011
    Assignee: Von Ardenne Anlagentechnic GmbH
    Inventors: Hans-Juergen Heinrich, Goetz Teschner, Thorsten Sander, Cornell Weidelt, Joern Brueckner
  • ROTATABLE SPUTTER TARGET COMPRISING AN END-BLOCK WITH A LIQUID COOLANT SUPPLY SYSTEM
    Publication number: 20090277787
    Abstract: A tube target with an end block for supplying coolant to the tube target is provided. The end block comprises a rotatably mounted carrier shaft for holding and rotating the tube target; a connecting sleeve arranged in the carrier shaft; a sealing element for the tube target on its end facing the end block; a coolant inlet port in the interior of the tube target; and a coolant outlet port. The coolant outlet port is formed by at least one aperture in the sealing element. The aperture is located in the vicinity of the wall of the tube target, and eccentrically to the rotational axis of the tube target.
    Type: Application
    Filed: May 6, 2009
    Publication date: November 12, 2009
    Applicant: VON ARDENNE ANLAGENTECHNIK GMBH
    Inventors: Thorsten SANDER, Cornell WEIDELT, Hans-Juergen HEINRICH
  • SUPPLY END BLOCK FOR ROTARY MAGNETRON
    Publication number: 20080128276
    Abstract: A supply end block to supply a sputter cathode with a coolant and electrical voltage, includes a housing with a coolant connection and a current connection as well as a support shaft mounted to rotate, on which a target tube is fastened. The coolant connection and current connection are brought together directly at a feed site so that the coolant is brought to the potential of the applied electric voltage on entering the housing of the end block. Optimal cooling of the current feed is achieved, and optimal potential equalization of the coolant simultaneously occurs.
    Type: Application
    Filed: October 17, 2007
    Publication date: June 5, 2008
    Applicant: VON ARDENNE Anlagentechnik GmbH
    Inventors: Hans-Juergen Heinrich, Goetz Teschner, Thorsten Sander, Cornell Weidelt, Joern Brueckner