Patents by Inventor Cory E. Sherman

Cory E. Sherman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NON-OXIDE BASED DIELECTRICS FOR SUPERCONDUCTOR DEVICES
    Publication number: 20170162513
    Abstract: A method of forming a superconductor device is provided. The method includes depositing a non-oxide based dielectric layer over a substrate, depositing a photoresist material layer over the non-oxide based dielectric layer, irradiating and developing the photoresist material layer to form a via pattern in the photoresist material layer, and etching the non-oxide based dielectric layer to form openings in the non-oxide based dielectric layer based on the via pattern. The method further comprises stripping the photoresist material layer, and filling the openings in the non-oxide based dielectric with a superconducting material to form a set of superconducting contacts.
    Type: Application
    Filed: December 8, 2015
    Publication date: June 8, 2017
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: JAMES T. KELLIHER, SANDRO J. DI GIACOMO, CORY E. SHERMAN, BRIAN P. WAGNER
  • Non-oxide based dielectrics for superconductor devices
    Patent number: 9653398
    Abstract: A method of forming a superconductor device is provided. The method includes depositing a non-oxide based dielectric layer over a substrate, depositing a photoresist material layer over the non-oxide based dielectric layer, irradiating and developing the photoresist material layer to form a via pattern in the photoresist material layer, and etching the non-oxide based dielectric layer to form openings in the non-oxide based dielectric layer based on the via pattern. The method further comprises stripping the photoresist material layer, and filling the openings in the non-oxide based dielectric with a superconducting material to form a set of superconducting contacts.
    Type: Grant
    Filed: December 8, 2015
    Date of Patent: May 16, 2017
    Assignee: Northrop Grumman Systems Corporation
    Inventors: James T. Kelliher, Sandro J. Di Giacomo, Cory E. Sherman, Brian P. Wagner