Patents by Inventor CORY EDWARD SHERMAN

CORY EDWARD SHERMAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methodology for forming a resistive element in a superconducting structure
    Patent number: 11783090
    Abstract: A method of forming a superconducting structure is provided that includes forming a superconducting element in a first dielectric layer, forming a protective pad formed from a resistive material over at least a portion of the superconducting element, forming a second dielectric layer overlying the first dielectric layer, and etching an opening through the second dielectric layer to the protective pad, such that no portion of the superconducting element is exposed in the opening. A cleaning process is performed on the superconducting structure, and a contact material fill with a resistive material is performed to fill the opening and form a resistive element in contact with the superconducting element through the protective pad.
    Type: Grant
    Filed: January 25, 2021
    Date of Patent: October 10, 2023
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Cory Edward Sherman, Shawn A. Keebaugh, Reuben C. Ferguson
  • Methodology for Forming a Resistive Element in a Superconducting Structure
    Publication number: 20210232710
    Abstract: A method of forming a superconducting structure is provided that includes forming a superconducting element in a first dielectric layer, forming a protective pad formed from a resistive material over at least a portion of the superconducting element, forming a second dielectric layer overlying the first dielectric layer, and etching an opening through the second dielectric layer to the protective pad, such that no portion of the superconducting element is exposed in the opening. A cleaning process is performed on the superconducting structure, and a contact material fill with a resistive material is performed to fill the opening and form a resistive element in contact with the superconducting element through the protective pad.
    Type: Application
    Filed: January 25, 2021
    Publication date: July 29, 2021
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: CORY EDWARD SHERMAN, SHAWN A. KEEBAUGH, REUBEN C. FERGUSON
  • Methodology for forming a resistive element in a superconducting structure
    Patent number: 10936756
    Abstract: A method of forming a superconducting structure is provided that includes forming a superconducting element in a first dielectric layer, forming a protective pad formed from a resistive material over at least a portion of the superconducting element, forming a second dielectric layer overlying the first dielectric layer, and etching an opening through the second dielectric layer to the protective pad, such that no portion of the superconducting element is exposed in the opening. A cleaning process is performed on the superconducting structure, and a contact material fill with a resistive material is performed to fill the opening and form a resistive element in contact with the superconducting element through the protective pad.
    Type: Grant
    Filed: January 20, 2017
    Date of Patent: March 2, 2021
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Cory Edward Sherman, Shawn A. Keebaugh, Reuben C. Ferguson
  • METHODOLOGY FOR FORMING A RESISTIVE ELEMENT IN A SUPERCONDUCTING STRUCTURE
    Publication number: 20180212134
    Abstract: A method of forming a superconducting structure is provided that includes forming a superconducting element in a first dielectric layer, forming a protective pad formed from a resistive material over at least a portion of the superconducting element, forming a second dielectric layer overlying the first dielectric layer, and etching an opening through the second dielectric layer to the protective pad, such that no portion of the superconducting element is exposed in the opening. A cleaning process is performed on the superconducting structure, and a contact material fill with a resistive material is performed to fill the opening and form a resistive element in contact with the superconducting element through the protective pad.
    Type: Application
    Filed: January 20, 2017
    Publication date: July 26, 2018
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: CORY EDWARD SHERMAN, SHAWN A. KEEBAUGH, REUBEN C. FERGUSON