Patents by Inventor Cory Eugene LAFOLLETT

Cory Eugene LAFOLLETT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR IMPROVED HIGH PRESSURE PLASMA PROCESSING
    Publication number: 20220359171
    Abstract: Embodiments of apparatus for high pressure plasma processing are provided herein. In some embodiments, the apparatus includes an isolator plate and grounding bracket for a substrate support, such as an electrostatic chuck, in a plasma processing chamber. In some embodiments, apparatus for high pressure plasma processing includes: an electrostatic chuck; a ground return bracket spaced apart from the electrostatic chuck; and a dielectric plate disposed between the electrostatic chuck and the ground return bracket.
    Type: Application
    Filed: May 5, 2022
    Publication date: November 10, 2022
    Inventors: William R. JOHANSON, Cory Eugene LAFOLLETT, Kirankumar Neelasandra SAVANDAIAH
  • Multi-cathode processing chamber with dual rotatable shields
    Patent number: 11361950
    Abstract: Embodiments of a process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a multi-cathode processing chamber includes: a first rotatable shield coupled to a first shaft, wherein the first rotatable shield includes a base, a conical portion extending downward and radially outward from the base, and one or more holes formed through the conical portion, wherein no two holes of the one or more holes are diametrically opposed; and a second rotatable shield coupled to a second shaft concentric with the first shaft, wherein the second rotatable shield is disposed in the first rotatable shield, and wherein the first rotatable shield is configured to rotate independent of the first rotatable shield.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: June 14, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: John Joseph Mazzocco, Cory Eugene Lafollett
  • MULTI-CATHODE PROCESSING CHAMBER WITH DUAL ROTATABLE SHIELDS
    Publication number: 20210327692
    Abstract: Embodiments of a process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a multi-cathode processing chamber includes: a first rotatable shield coupled to a first shaft, wherein the first rotatable shield includes a base, a conical portion extending downward and radially outward from the base, and one or more holes formed through the conical portion, wherein no two holes of the one or more holes are diametrically opposed; and a second rotatable shield coupled to a second shaft concentric with the first shaft, wherein the second rotatable shield is disposed in the first rotatable shield, and wherein the first rotatable shield is configured to rotate independent of the first rotatable shield.
    Type: Application
    Filed: April 15, 2020
    Publication date: October 21, 2021
    Inventors: John Joseph MAZZOCCO, Cory Eugene LAFOLLETT