Abstract: Hot, saturated water vapor in the form of low-temperature subatmospheric steam is employed to shorten the aeration period after sterilization with a condensable, heat-labile chemical sterilant. The application of steam accelerates the rate of outgassing of sterilant residuals that are absorbed into, or adsorbed or condensed onto chamber or load materials. The method is particularly suitable for removing residuals from polymeric materials and/or materials that are poor heat conductors. Apparatus is provided to supply steam in situations where a utility steam supply is not available.